发明授权
US08604150B2 Epoxy group-containing organosiloxane compound, curable composition for transfer materials and method for forming micropattern using the composition
失效
含有环氧基的有机硅氧烷化合物,转印材料用固化性组合物和使用该组合物形成微图案的方法
- 专利标题: Epoxy group-containing organosiloxane compound, curable composition for transfer materials and method for forming micropattern using the composition
- 专利标题(中): 含有环氧基的有机硅氧烷化合物,转印材料用固化性组合物和使用该组合物形成微图案的方法
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申请号: US12741148申请日: 2008-11-05
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公开(公告)号: US08604150B2公开(公告)日: 2013-12-10
- 发明人: Katsutoshi Morinaka , Yoshikazu Arai , Hiroshi Uchida , Toshio Fujita
- 申请人: Katsutoshi Morinaka , Yoshikazu Arai , Hiroshi Uchida , Toshio Fujita
- 申请人地址: JP Tokyo
- 专利权人: Showa Denko K.K.
- 当前专利权人: Showa Denko K.K.
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2007-289470 20071107
- 国际申请: PCT/JP2008/070122 WO 20081105
- 国际公布: WO2009/060862 WO 20090514
- 主分类号: C08G77/08
- IPC分类号: C08G77/08
摘要:
The present invention has an object to provide a curable composition for transfer materials. The curable composition is applicable to a UV nanoimprint process capable of forming micropatterns with high throughput, is applicable to a thermal nanoimprint process in some cases, and is capable of forming a micropattern having high selectivity on etching rates regarding a fluorine-based gas and an oxygen gas. A curable composition for transfer materials of the present invention contains a curable silicon compound produced by subjecting a silicon compound (A) having a Si—H group and a compound (B) having a curable functional group and a carbon-carbon double bond other than the curable functional group to a hydrosilylation reaction.
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