发明授权
US08604150B2 Epoxy group-containing organosiloxane compound, curable composition for transfer materials and method for forming micropattern using the composition 失效
含有环氧基的有机硅氧烷化合物,转印材料用固化性组合物和使用该组合物形成微图案的方法

Epoxy group-containing organosiloxane compound, curable composition for transfer materials and method for forming micropattern using the composition
摘要:
The present invention has an object to provide a curable composition for transfer materials. The curable composition is applicable to a UV nanoimprint process capable of forming micropatterns with high throughput, is applicable to a thermal nanoimprint process in some cases, and is capable of forming a micropattern having high selectivity on etching rates regarding a fluorine-based gas and an oxygen gas. A curable composition for transfer materials of the present invention contains a curable silicon compound produced by subjecting a silicon compound (A) having a Si—H group and a compound (B) having a curable functional group and a carbon-carbon double bond other than the curable functional group to a hydrosilylation reaction.
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