- 专利标题: Non-volatile memory devices and methods of manufacturing the same
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申请号: US13092239申请日: 2011-04-22
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公开(公告)号: US08610195B2公开(公告)日: 2013-12-17
- 发明人: Jung-Geun Jee , Seok-Hoon Kim , Su-Jin Shin , Woo-Sung Lee , Tae-Ouk Kwon
- 申请人: Jung-Geun Jee , Seok-Hoon Kim , Su-Jin Shin , Woo-Sung Lee , Tae-Ouk Kwon
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2010-0048511 20100525
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A non-volatile memory device includes a field region that defines an active region in a semiconductor substrate, a floating gate pattern on the active region, a dielectric layer on the floating gate pattern and a control gate on the dielectric layer. The control gate includes a first conductive pattern that has a first composition that crystallizes in a first temperature range, and a second conductive pattern that has a second composition that is different from the first composition and that crystallizes in a second temperature range that is lower than the first temperature range, the first conductive pattern being between the dielectric layer and the second conductive pattern.
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