发明授权
- 专利标题: Reticle pod
- 专利标题(中): 标线荚
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申请号: US13562087申请日: 2012-07-30
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公开(公告)号: US08613359B2公开(公告)日: 2013-12-24
- 发明人: Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
- 申请人: Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Christensen Fonder P.A.
- 主分类号: B65D85/48
- IPC分类号: B65D85/48
摘要:
A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.
公开/授权文献
- US20130020220A1 RETICLE POD 公开/授权日:2013-01-24
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