发明授权
US08617653B2 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
有权
用于形成精细图案的过涂层剂和使用这种试剂形成精细图案的方法
- 专利标题: Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
- 专利标题(中): 用于形成精细图案的过涂层剂和使用这种试剂形成精细图案的方法
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申请号: US12885782申请日: 2010-09-20
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公开(公告)号: US08617653B2公开(公告)日: 2013-12-31
- 发明人: Tsunehiro Watanabe , Toshiki Takedutsumi , Masanori Yagishita , Kiyofumi Mitome , Takahito Imai , Masatoshi Hashimoto , Masaji Uetsuka
- 申请人: Tsunehiro Watanabe , Toshiki Takedutsumi , Masanori Yagishita , Kiyofumi Mitome , Takahito Imai , Masatoshi Hashimoto , Masaji Uetsuka
- 申请人地址: JP Kanagawa
- 专利权人: Tokyo Ohka Okgyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Okgyo Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2006-226073 20060823
- 主分类号: B05D3/02
- IPC分类号: B05D3/02 ; C09D11/10 ; C08L39/06
摘要:
It is disclosed an over-coating agent for forming fine patterns which is applied to cover a substrate having photoresist patterns thereon and allowed to shrink under heat so that the spacing between adjacent photoresist patterns is lessened, with the applied film of the over-coating agent being removed to form fine patterns, further characterized by comprising a water-soluble polymer which contains a monomeric component and a dimeric component, wherein the total content of the monomeric component and the dimeric component in the water-soluble polymer is reduced to 10 mass % or less, and a method of forming fine patterns using the same. By the present invention, even in reducing the pattern size on a substrate having thereon patterns having different pitches, the heat shrinkage of the over-coating agent can be controlled, irrespective whether the pitch is dense or isolate, thus achieving the pattern size reduction.
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