Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
    1.
    发明授权
    Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent 有权
    用于形成精细图案的过涂层剂和使用这种试剂形成精细图案的方法

    公开(公告)号:US08617653B2

    公开(公告)日:2013-12-31

    申请号:US12885782

    申请日:2010-09-20

    IPC分类号: B05D3/02 C09D11/10 C08L39/06

    CPC分类号: H01L21/0273 G03F7/40

    摘要: It is disclosed an over-coating agent for forming fine patterns which is applied to cover a substrate having photoresist patterns thereon and allowed to shrink under heat so that the spacing between adjacent photoresist patterns is lessened, with the applied film of the over-coating agent being removed to form fine patterns, further characterized by comprising a water-soluble polymer which contains a monomeric component and a dimeric component, wherein the total content of the monomeric component and the dimeric component in the water-soluble polymer is reduced to 10 mass % or less, and a method of forming fine patterns using the same. By the present invention, even in reducing the pattern size on a substrate having thereon patterns having different pitches, the heat shrinkage of the over-coating agent can be controlled, irrespective whether the pitch is dense or isolate, thus achieving the pattern size reduction.

    摘要翻译: 公开了一种用于形成精细图案的过涂层剂,其被用于覆盖其上具有光刻胶图案的基材并且在加热下使其收缩,使得相邻光致抗蚀剂图案之间的间隔减小,所涂覆的涂膜 被除去以形成精细图案,其特征还在于包含含有单体组分和二聚组分的水溶性聚合物,其中水溶性聚合物中单体组分和二聚组分的总含量降低至10质量% 以下,以及使用其形成精细图案的方法。 通过本发明,即使在其上具有不同间距的图案的基板上减小图案尺寸,也可以控制外涂层的热收缩,而不管间距是致密的还是隔离的,从而实现图案尺寸的减小。

    OVER-COATING AGENT FOR FORMING FINE PATTERNS AND A METHOD OF FORMING FINE PATTERNS USING SUCH AGENT
    2.
    发明申请
    OVER-COATING AGENT FOR FORMING FINE PATTERNS AND A METHOD OF FORMING FINE PATTERNS USING SUCH AGENT 有权
    用于形成精细图案的超涂层剂和使用这种代理形成精细图案的方法

    公开(公告)号:US20110183071A1

    公开(公告)日:2011-07-28

    申请号:US12885782

    申请日:2010-09-20

    CPC分类号: H01L21/0273 G03F7/40

    摘要: It is disclosed an over-coating agent for forming fine patterns which is applied to cover a substrate having photoresist patterns thereon and allowed to shrink under heat so that the spacing between adjacent photoresist patterns is lessened, with the applied film of the over-coating agent being removed to form fine patterns, further characterized by comprising a water-soluble polymer which contains a monomeric component and a dimeric component, wherein the total content of the monomeric component and the dimeric component in the water-soluble polymer is reduced to 10 mass % or less, and a method of forming fine patterns using the same. By the present invention, even in reducing the pattern size on a substrate having thereon patterns having different pitches, the heat shrinkage of the over-coating agent can be controlled, irrespective whether the pitch is dense or isolate, thus achieving the pattern size reduction.

    摘要翻译: 公开了一种用于形成精细图案的过涂层剂,其被用于覆盖其上具有光刻胶图案的基材并且在加热下使其收缩,使得相邻光致抗蚀剂图案之间的间隔减小,所涂覆的涂膜 被除去以形成精细图案,其特征还在于包含含有单体组分和二聚组分的水溶性聚合物,其中水溶性聚合物中单体组分和二聚组分的总含量降低至10质量% 以下,以及使用其形成精细图案的方法。 通过本发明,即使在其上具有不同间距的图案的基板上减小图案尺寸,也可以控制外涂层的热收缩,而不管间距是致密的还是隔离的,从而实现图案尺寸的减小。

    JOINT FOR FLUID CONTAINER
    3.
    发明申请
    JOINT FOR FLUID CONTAINER 有权
    液体容器接头

    公开(公告)号:US20090020176A1

    公开(公告)日:2009-01-22

    申请号:US12162245

    申请日:2006-11-07

    IPC分类号: F16L37/23 B65D83/00

    摘要: A joint for duplex storage type fluid container that can attain secure fitting of a liquid discharge tube and can attain easy, secure connection of a passage for fluid emission disposed in a dispenser to the liquid discharge tube. There is provided a joint for fluid container comprising flexible bag (12) furnished with neck part (11) openable for permitting injection of liquid and comprising outside container (13) formed so as to support the neck part (11) by mouth part (13a) and accommodate the bag (12), which joint is so structured that liquid discharge tube (15) with collar part (15a) can be fitted through plug (14) to the mouth part (13a) of the outside container (13), and further so structured that flow channel (21a) fitted to dispenser (2) can be linked directly to fluid passage (15b) of the liquid discharge tube (15).

    摘要翻译: 一种用于双重存储型流体容器的接头,其可以实现液体排出管的牢固配合,并且可以将设置在分配器中的用于流体排放的通道的容易且牢固地连接到液体排出管。 提供了一种用于流体容器的接头,该接头包括柔性袋(12),其具有可打开以允许液体注入的颈部(11),并且包括形成为通过口部(13a)支撑颈部(11)的外部容器 )并且容纳袋(12),该接头的结构使得具有套环部分(15a)的液体排出管(15)可以通过插塞(14)装配到外部容器(13)的口部(13a) 并且进一步如此构造使得装配到分配器(2)的流动通道(21a)可以直接连接到液体排出管(15)的流体通道(15b)。

    FLUID CONTAINER AND FLUID-CONTAINING CONTAINER USING THE SAME
    4.
    发明申请
    FLUID CONTAINER AND FLUID-CONTAINING CONTAINER USING THE SAME 有权
    流体容器和使用该容器的流体容器

    公开(公告)号:US20090230132A1

    公开(公告)日:2009-09-17

    申请号:US12306094

    申请日:2007-06-25

    IPC分类号: B65D25/14 B65D33/16

    CPC分类号: B65D77/06

    摘要: A fluid container in which a packaging bag with a spout is not likely to break due to a pin hole or breakage of an edge of the bag during storage or transportation, that has superior cleanliness for fluid contents, in which the packaging bag can be attached to and detached from an external container, and that is superior in working efficiency and hygiene. The container (1) has an external container (20) having an opening portion (24) and the spout-equipped packaging bag (10) used as the inner bag of the external container (20) and having the spout (11) joined to a packaging bag body (12). The packaging bag body (12) is receivable in the external container (20). The spout (11) is attachable to and detachable from the opening portion (24) of the external container (20). The packing bag body (12) is formed as a bag body by forming a heat seal portion (122) about the periphery of at least two sheets of films. A portion of the spout (11) is joined to the heat seal portion (122), at a predetermined position between the seal surfaces of the heat seal portion (122).

    摘要翻译: 一种流体容器,其中具有喷口的包装袋在储存或运输期间不会由于针孔或袋边缘的破裂而不容易断裂,对于其中可以附接包装袋的流体内容物具有优异的清洁度 从外部容器拆卸,工作效率和卫生性优异。 容器(1)具有外部容器(20),该外部容器具有开口部分(24)和用作外部容器(20)的内部袋子的喷口包装袋(10),并且具有连接到 包装袋体(12)。 包装袋体(12)可接收在外部容器(20)中。 喷嘴(11)能够从外部容器(20)的开口部分(24)可拆卸。 通过在至少两片薄膜的周围形成热密封部分(122),将包装袋体(12)形成为袋体。 喷嘴(11)的一部分在热封部分(122)的密封表面之间的预定位置处接合到热封部分(122)。

    Joint for fluid container
    5.
    发明授权
    Joint for fluid container 有权
    流体容器接头

    公开(公告)号:US08381768B2

    公开(公告)日:2013-02-26

    申请号:US12162245

    申请日:2006-11-07

    IPC分类号: F16K24/00

    摘要: A joint for duplex storage type fluid container that can attain secure fitting of a liquid discharge tube and can attain easy, secure connection of a passage for fluid emission disposed in a dispenser to the liquid discharge tube. There is provided a joint for fluid container comprising flexible bag (12) furnished with neck part (11) openable for permitting injection of liquid and comprising outside container (13) formed so as to support the neck part (11) by mouth part (13a) and accommodate the bag (12), which joint is so structured that liquid discharge tube (15) with collar part (15a) can be fitted through plug (14) to the mouth part (13a) of the outside container (13), and further so structured that flow channel (21a) fitted to dispenser (2) can be linked directly to fluid passage (15b) of the liquid discharge tube (15).

    摘要翻译: 一种用于双重存储型流体容器的接头,其可以实现液体排出管的牢固配合,并且可以将设置在分配器中的用于流体排放的通道的容易且牢固地连接到液体排出管。 提供了一种用于流体容器的接头,该接头包括柔性袋(12),其具有可打开以允许液体注入的颈部(11),并且包括形成为通过口部(13a)支撑颈部(11)的外部容器 )并且容纳袋(12),该接头的结构使得具有套环部分(15a)的液体排出管(15)可以通过插塞(14)装配到外部容器(13)的口部(13a) 并且进一步如此构造使得装配到分配器(2)的流动通道(21a)可以直接连接到液体排出管(15)的流体通道(15b)。

    Fluid container
    6.
    发明授权
    Fluid container 有权
    流体容器

    公开(公告)号:US08052014B2

    公开(公告)日:2011-11-08

    申请号:US12161632

    申请日:2006-11-02

    IPC分类号: B65D35/28

    摘要: A dual storage system-type fluid container in which a liquid pouring tube is securely fitted and a liquid discharging passage formed in a dispenser is easily and securely connected to the liquid pouring tube. A joint for the fluid container comprises a flexible bag (12) having a neck part (11) opened such that liquid can be poured through it and also has an outer container (13) for receiving the bag (12) with the neck part (11) supported by a mouth part (13a). The liquid pouring tube (15) having a flange part (15a) can be fitted to the mouth part (13a) of the outer container (13) with a retainer (14) placed between the tube and the mouth part. A flow passage (21a) formed in the dispenser (2) can be directly connected to the fluid passage (15b) of the liquid pouring tube (15).

    摘要翻译: 一种双重存储系统型流体容器,其中液体浇注管被牢固地装配,并且在分配器中形成的液体排放通道容易且牢固地连接到液体浇注管。 用于流体容器的接头包括柔性袋(12),其具有打开的颈部(11),使得可以将液体注入其中,并且还具有用于接收具有颈部的袋(12)的外容器(13) 11),由口部(13a)支撑。 具有凸缘部(15a)的液体注入管(15)可以通过设置在管和口部之间的保持器(14)而装配到外容器(13)的口部(13a)。 形成在分配器(2)中的流路(21a)可以直接连接到液体浇注管(15)的流体通道(15b)。

    Fluid Container
    7.
    发明申请
    Fluid Container 有权
    流体容器

    公开(公告)号:US20090184133A1

    公开(公告)日:2009-07-23

    申请号:US12161632

    申请日:2006-11-02

    IPC分类号: B65D35/28 B65D35/56 B65D83/00

    摘要: A dual storage system-type fluid container in which a liquid pouring tube is securely fitted and a liquid discharging passage formed in a dispenser is easily and securely connected to the liquid pouring tube. A joint for the fluid container comprises a flexible bag (12) having a neck part (11) opened such that liquid can be poured through it and also has an outer container (13) for receiving the bag (12) with the neck part (11) supported by a mouth part (13a). The liquid pouring tube (15) having a flange part (15a) can be fitted to the mouth part (13a) of the outer container (13) with a retainer (14) placed between the tube and the mouth part. A flow passage (21a) formed in the dispenser (2) can be directly connected to the fluid passage (15b) of the liquid pouring tube (15).

    摘要翻译: 一种双重存储系统型流体容器,其中液体浇注管被牢固地装配,并且在分配器中形成的液体排放通道容易且牢固地连接到液体浇注管。 用于流体容器的接头包括柔性袋(12),其具有打开的颈部(11),使得可以将液体注入其中,并且还具有用于接收具有颈部的袋(12)的外容器(13) 11),由口部(13a)支撑。 具有凸缘部(15a)的液体注入管(15)可以通过设置在管和口部之间的保持器(14)而装配到外容器(13)的口部(13a)。 形成在分配器(2)中的流路(21a)可以直接连接到液体浇注管(15)的流体通道(15b)。