发明授权
- 专利标题： Cantilever for magnetic force microscope and method of manufacturing the same
- 专利标题（中）： 悬臂式磁力显微镜及其制造方法
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申请号： US13462845申请日： 2012-05-03
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公开(公告)号： US08621659B2公开(公告)日： 2013-12-31
- 发明人: Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
- 申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 优先权： JP2011-104151 20110509
- 主分类号： G01Q60/36
- IPC分类号： G01Q60/36 ; G01Q60/42 ; G01Q60/54 ; G01Q70/16
摘要：
In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
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