Invention Grant
- Patent Title: Substrate processing apparatus having electrode member
- Patent Title (中): 具有电极部件的基板处理装置
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Application No.: US12146790Application Date: 2008-06-26
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Publication No.: US08623173B2Publication Date: 2014-01-07
- Inventor: Hyoung-Kyu Son
- Applicant: Hyoung-Kyu Son
- Applicant Address: KR Seongnam-Si
- Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee Address: KR Seongnam-Si
- Agency: KED & Associates LLP
- Priority: KR10-2007-0093859 20070914; KR10-2007-0093860 20070914
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306 ; F25B21/02
Abstract:
An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect.
Public/Granted literature
- US20090071524A1 SUBSTRATE PROCESSING APPARATUS HAVING ELECTRODE MEMBER Public/Granted day:2009-03-19
Information query
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