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    Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the same
    4.
    发明申请
    Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the same 审中-公开
    静电吸盘，具有该静电吸盘的基板处理装置以及使用其的基板处理方法

    公开(公告)号：US20080055813A1

    公开(公告)日：2008-03-06

    申请号：US11892628

    申请日：2007-08-24

    申请人： Hyoung-Kyu Son

    发明人： Hyoung-Kyu Son

    IPC分类号： H01L21/683 ,  H01L21/67

    CPC分类号： H01L21/6833

    摘要： An electrostatic chuck includes both a DC power supply and an AC power supply. DC power is supplied to an electrode of the chuck to generate an electrostatic holding force that holds a substrate on the chuck during substrate processing steps. When it is time to remove the substrate from the chuck, the DC power is cut off, and an AC power is applied to help eliminate any residual charge left on the chuck after the DC power has been cut off.

    摘要翻译： 静电卡盘包括直流电源和交流电源。 DC电源被提供给卡盘的电极，以产生在基板处理步骤期间将基板保持在卡盘上的静电保持力。 当要从卡盘中取出基板的时候，直流电源被切断，并且在直流电源被切断之后，施加交流电力以帮助消除卡盘上残留的剩余电荷。

    EMBOSSING APPARATUS AND METHOD
    8.
    发明申请
    EMBOSSING APPARATUS AND METHOD 失效
    破坏装置和方法

    公开(公告)号：US20070266867A1

    公开(公告)日：2007-11-22

    申请号：US11748542

    申请日：2007-05-15

    申请人： Hyoung-Kyu Son

    发明人： Hyoung-Kyu Son

    IPC分类号： B44B5/00

    CPC分类号： B44B5/00

    摘要： The present invention relates to an embossing apparatus and method, and more particularly, to an embossing apparatus and method capable of forming an embossed portion by dropping melt and solidifying and pressing it into a predetermined shape. According to the present invention, an apparatus for forming an embossed portion on a workpiece comprises a melting chamber filled with melt, such as ceramic, to be a material of the embossed portion; an injection nozzle connected to a lower portion of the melting chamber and dropping the melt; and a press for pressing the melt to have a predetermined shape in a state where the melt is being solidified after being dropped onto the workpiece.

    摘要翻译： 压花装置和方法技术领域本发明涉及一种压花装置和方法，更具体地说，涉及一种压花装置和方法，该压纹装置和方法能够通过将熔融物熔化并固化并压制成预定形状而形成压花部分。 根据本发明，用于在工件上形成压花部分的装置包括：填充有诸如陶瓷的熔体的熔化室，作为压纹部分的材料; 注入喷嘴，其连接到熔化室的下部并使熔体下降; 以及在熔融物在滴落到工件上之后凝固的状态下将熔体挤压成具有预定形状的压力机。

    Substrate processing apparatus having electrode member
    9.
    发明授权
    Substrate processing apparatus having electrode member 失效
    具有电极部件的基板处理装置

    公开(公告)号：US08623173B2

    公开(公告)日：2014-01-07

    申请号：US12146790

    申请日：2008-06-26

    申请人： Hyoung-Kyu Son

    发明人： Hyoung-Kyu Son

    IPC分类号： C23C16/00 ,  H01L21/306 ,  F25B21/02

    CPC分类号： H01L21/67109

    摘要： An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect.

    摘要翻译： 用于产生等离子体的电极构件包括电极板和具有与电极板热接触的多个热电模块的冷却单元。 热电模块可以基于珀尔帖效应来调节电极板的温度。