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US08637350B2 Method of manufacturing chip-stacked semiconductor package 有权
芯片堆叠半导体封装的制造方法

Method of manufacturing chip-stacked semiconductor package
Abstract:
A method of manufacturing a chip-stacked semiconductor package, the method including preparing a base wafer including a plurality of first chips each having a through-silicon via (TSV); bonding the base wafer including the plurality of first chips to a supporting carrier; preparing a plurality of second chips; forming stacked chips by bonding the plurality of second chips to the plurality of first chips; sealing the stacked chips with a sealing portion; and separating the stacked chips from each other.
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