发明授权
- 专利标题: Imaging apparatus and method thereof
- 专利标题(中): 成像装置及其方法
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申请号: US13163862申请日: 2011-06-20
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公开(公告)号: US08638445B2公开(公告)日: 2014-01-28
- 发明人: Yu-Hsuan Lin , Shih-Yao Pan , Hsin-Yueh Sung , Alvin Chang , Hung-Ta Chien
- 申请人: Yu-Hsuan Lin , Shih-Yao Pan , Hsin-Yueh Sung , Alvin Chang , Hung-Ta Chien
- 申请人地址: TW Tao-Yuan, Hsien
- 专利权人: Chroma Ate Inc.
- 当前专利权人: Chroma Ate Inc.
- 当前专利权人地址: TW Tao-Yuan, Hsien
- 代理机构: Rosenberg, Klein & Lee
- 优先权: TW99121180A 20100629
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
An imaging apparatus includes a light source; a first beam splitter for reflecting a projection beam emitted by the light source; an objective lens unit including a reflection reference surface for reproducing the projection beam into a measurement beam projected onto an object to generate a first reflection beam and a reference beam projected onto the reflection reference surface to generate a second reflection beam mixing with the first reflection beam and passing through the first splitter and forming an operating beam; a second beam splitter for modulating the operating beam into first and second sub-beams; a monochrome image detection device for passage of the first sub-beam to obtain an interferometric image with monochrome from a first interference region; and an image detection device for permitting passage of the second sub-beam in order to obtain a non-interferometric image from a second interference region.
公开/授权文献
- US20110317169A1 IMAGING APPARATUS AND METHOD THEREOF 公开/授权日:2011-12-29
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