公开(公告)号：US08638445B2

公开(公告)日：2014-01-28

申请号：US13163862

申请日：2011-06-20

申请人： Yu-Hsuan Lin ,  Shih-Yao Pan ,  Hsin-Yueh Sung ,  Alvin Chang ,  Hung-Ta Chien

发明人： Yu-Hsuan Lin ,  Shih-Yao Pan ,  Hsin-Yueh Sung ,  Alvin Chang ,  Hung-Ta Chien

IPC分类号： G01B11/02

CPC分类号： G01B11/24 ,  G01B11/2441

摘要： An imaging apparatus includes a light source; a first beam splitter for reflecting a projection beam emitted by the light source; an objective lens unit including a reflection reference surface for reproducing the projection beam into a measurement beam projected onto an object to generate a first reflection beam and a reference beam projected onto the reflection reference surface to generate a second reflection beam mixing with the first reflection beam and passing through the first splitter and forming an operating beam; a second beam splitter for modulating the operating beam into first and second sub-beams; a monochrome image detection device for passage of the first sub-beam to obtain an interferometric image with monochrome from a first interference region; and an image detection device for permitting passage of the second sub-beam in order to obtain a non-interferometric image from a second interference region.

摘要翻译： 一种成像装置，包括光源; 用于反射由光源发射的投影光束的第一分束器; 物镜单元，包括用于将投影光束再现成投射到物体上的测量光束以产生第一反射光束的反射参考表面和投影到反射参考表面上的参考光束，以产生与第一反射光束混合的第二反射光束 并穿过第一分流器并形成操作梁; 第二分束器，用于将操作光束调制成第一和第二子光束; 用于通过第一子光束以从第一干涉区域获得具有单色的干涉图像的单色图像检测装置; 以及用于允许第二子光束通过以从第二干涉区域获得非干涉图像的图像检测装置。

公开(公告)号：US20220018656A1

公开(公告)日：2022-01-20

申请号：US17377439

申请日：2021-07-16

申请人： Shih-Yao PAN ,  Chih-Yao TING ,  Chia-Hung LIN ,  Hsin-Yun CHANG

发明人： Shih-Yao PAN ,  Chih-Yao TING ,  Chia-Hung LIN ,  Hsin-Yun CHANG

IPC分类号： G01B11/30

摘要： Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.

公开(公告)号：US20110317169A1

公开(公告)日：2011-12-29

申请号：US13163862

申请日：2011-06-20

申请人： YU-HSUAN LIN ,  SHIH-YAO PAN ,  HSIN-YUEH SUNG ,  ALVIN CHANG ,  HUNG-TA CHIEN

发明人： YU-HSUAN LIN ,  SHIH-YAO PAN ,  HSIN-YUEH SUNG ,  ALVIN CHANG ,  HUNG-TA CHIEN

IPC分类号： G01B11/02

CPC分类号： G01B11/24 ,  G01B11/2441

摘要： An imaging apparatus includes a light source; a first beam splitter for reflecting a projection beam emitted by the light source; an objective lens unit including a reflection reference surface for reproducing the projection beam into a measurement beam projected onto an object to generate a first reflection beam and a reference beam projected onto the reflection reference surface to generate a second reflection beam mixing with the first reflection beam and passing through the first splitter and forming an operating beam; a second beam splitter for modulating the operating beam into first and second sub-beams; a monochrome image detection device for passage of the first sub-beam to obtain an interferometric image with monochrome from a first interference region; and an image detection device for permitting passage of the second sub-beam in order to obtain a non-interferometric image from a second interference region.

摘要翻译： 一种成像装置，包括光源; 用于反射由光源发射的投影光束的第一分束器; 物镜单元，包括用于将投影光束再现成投射到物体上的测量光束以产生第一反射光束的反射参考表面和投影到反射参考表面上的参考光束，以产生与第一反射光束混合的第二反射光束 并穿过第一分流器并形成操作梁; 第二分束器，用于将操作光束调制成第一和第二子光束; 用于通过第一子光束以从第一干涉区域获得具有单色的干涉图像的单色图像检测装置; 以及用于允许第二子光束通过以从第二干涉区域获得非干涉图像的图像检测装置。

公开(公告)号：US11841218B2

公开(公告)日：2023-12-12

申请号：US17377439

申请日：2021-07-16

申请人： Shih-Yao Pan ,  Chih-Yao Ting ,  Chia-Hung Lin ,  Hsin-Yun Chang

发明人： Shih-Yao Pan ,  Chih-Yao Ting ,  Chia-Hung Lin ,  Hsin-Yun Chang

IPC分类号： G01B11/30

CPC分类号： G01B11/303

摘要： Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.