发明授权
- 专利标题: Forming separation directives using a printing feasibility analysis
- 专利标题(中): 使用打印可行性分析形成分离指令
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申请号: US12183046申请日: 2008-07-30
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公开(公告)号: US08640059B2公开(公告)日: 2014-01-28
- 发明人: Emile Y. Sahouria , Alexander V. Tritchkov
- 申请人: Emile Y. Sahouria , Alexander V. Tritchkov
- 申请人地址: US OR Wilsonville
- 专利权人: Mentor Graphics Corporation
- 当前专利权人: Mentor Graphics Corporation
- 当前专利权人地址: US OR Wilsonville
- 代理机构: Mentor Graphics Corporation
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Separation directives for integrated circuit layout design data are formed based upon one or more printing feasibility analyses performed on the layout design data. At least one printing feasibility analysis is performed on layout design data to identify portions of the design that may not be correctly formed or “printed” during a photolithographic process. The geometric element edges involved in a potential printing defect are then identified as edges to be formed using separate masks. Further, separation directives may be created to specifically designate the identified edges as edges to be formed using separate masks in a photolithographic manufacturing process.
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