Invention Grant
- Patent Title: Method and apparatus for reducing package warpage
- Patent Title (中): 减少包装翘曲的方法和装置
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Application No.: US13476340Application Date: 2012-05-21
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Publication No.: US08642445B2Publication Date: 2014-02-04
- Inventor: Meng-Tse Chen , Hui-Min Huang , Chun-Cheng Lin , Chih-Chun Chiu , Ming-Da Cheng , Chung-Shi Liu
- Applicant: Meng-Tse Chen , Hui-Min Huang , Chun-Cheng Lin , Chih-Chun Chiu , Ming-Da Cheng , Chung-Shi Liu
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L21/301
- IPC: H01L21/301

Abstract:
Embodiments of mechanisms for flattening a packaged structure are provided. The mechanisms involve a flattening apparatus and the utilization of protection layer(s) between the packaged structure and the surface(s) of the flattening apparatus. The protection layer(s) is made of a soft and non-sticking material to allow protecting exposed fragile elements of the packaged structure and easy separation after processing. The embodiments of flattening process involve flattening the warped packaged structure by pressure under elevated processing temperature. Processing under elevated temperature allows the package structure to be flattened within a reasonable processing time.
Public/Granted literature
- US20130260535A1 METHOD AND APPARATUS FOR REDUCING PACKAGE WARPAGE Public/Granted day:2013-10-03
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