Invention Grant
- Patent Title: Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus
- Patent Title (中): 用于制造机电换能器的方法,通过该方法制造的机电换能器,液滴喷射头和液滴喷射装置
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Application No.: US13265192Application Date: 2010-05-27
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Publication No.: US08646180B2Publication Date: 2014-02-11
- Inventor: Yoshikazu Akiyama , Takakazu Kihira , Keiji Ueda , Akira Shimofuku , Osamu Machida
- Applicant: Yoshikazu Akiyama , Takakazu Kihira , Keiji Ueda , Akira Shimofuku , Osamu Machida
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-128383 20090528; JP2010-119873 20100525
- International Application: PCT/JP2010/059404 WO 20100527
- International Announcement: WO2010/137737 WO 20101202
- Main IPC: B21D53/76
- IPC: B21D53/76 ; B23P17/00 ; B41J2/015

Abstract:
A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.
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