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    Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus
    2.
    发明授权
    Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus 有权
    用于制造机电换能器的方法，通过该方法制造的机电换能器，液滴喷射头和液滴喷射装置

    公开(公告)号：US08646180B2

    公开(公告)日：2014-02-11

    申请号：US13265192

    申请日：2010-05-27

    申请人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    发明人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/015

    CPC分类号： H01L41/0973 ,  H01L41/318

    摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

    摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

    METHOD FOR PRODUCING ELECTROMECHANICAL TRANSDUCER, ELECTROMECHANICAL TRANSDUCER PRODUCED BY THE METHOD, LIQUID-DROPLET JETTING HEAD, AND LIQUID-DROPLET JETTING APPARATUS
    4.
    发明申请
    METHOD FOR PRODUCING ELECTROMECHANICAL TRANSDUCER, ELECTROMECHANICAL TRANSDUCER PRODUCED BY THE METHOD, LIQUID-DROPLET JETTING HEAD, AND LIQUID-DROPLET JETTING APPARATUS 有权
    生产机电传感器的方法，由该方法生产的机电传感器，液滴喷射头和液滴喷射装置

    公开(公告)号：US20120038712A1

    公开(公告)日：2012-02-16

    申请号：US13265192

    申请日：2010-05-27

    申请人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    发明人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    IPC分类号： B41J2/04 ,  H02K15/00

    CPC分类号： H01L41/0973 ,  H01L41/318

    摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

    摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤; 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

    Electromechanical transducer film and method for manufacturing electromechanical transducer film
    5.
    发明授权
    Electromechanical transducer film and method for manufacturing electromechanical transducer film 有权
    机电换能器薄膜及制造机电换能器薄膜的方法

    公开(公告)号：US08425026B2

    公开(公告)日：2013-04-23

    申请号：US13004203

    申请日：2011-01-11

    申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

    发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

    IPC分类号： B41J2/04 ,  B41J2/17

    CPC分类号： B41J2/14233 ,  H01L41/0805 ,  H01L41/0926 ,  H01L41/318

    摘要： A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.

    摘要翻译： 一种制造机电换能器薄膜的方法，所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜，所述方法包括以下步骤：a）修改下电极的表面，b） 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面，在下电极的表面上形成第一溶胶 - 凝胶溶液膜，以及c）在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b）中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c）中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。

    Electromechanical transducer element, droplet discharge head, and droplet discharge device
    6.
    发明授权
    Electromechanical transducer element, droplet discharge head, and droplet discharge device 有权
    机电换能器元件，液滴喷头和液滴喷射装置

    公开(公告)号：US08727505B2

    公开(公告)日：2014-05-20

    申请号：US13529304

    申请日：2012-06-21

    申请人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

    发明人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14258 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318

    摘要： Disclosed is an electromechanical transducer element that includes an electromechanical transducer film formed of a complex oxide (PZT) including lead (Pb), zirconium (Zr), and titanium (Ti). The electromechanical transducer film is formed by laminating plural PZT thin films until a thickness of the formed electromechanical transducer film becomes a predetermined thickness. When an atomic weight ratio (Pb/(Zr+Ti)) of average Pb included in the formed electromechanical transducer film is denoted by Pb(avg) and an atomic weight ratio (Pb/(Zr+Ti)) of Pb in any one of laminate interfaces of the plural PZT thin films is denoted by Pb(interface), the Pb(avg) is greater than or equal to 100 atomic percentage (at %) and less than or equal to 110 atomic percentage (at %), and a fluctuation ratio ΔPb=Pb(avg)−Pb(interface) of Pb in the laminate interface is less than or equal to 20 percent.

    摘要翻译： 公开了一种机电换能器元件，其包括由包括铅（Pb），锆（Zr）和钛（Ti）的复合氧化物（PZT）形成的机电换能器膜。 机电换能器膜通过层压多个PZT薄膜而形成，直到所形成的机电换能器膜的厚度成为预定厚度。 当在所形成的机电换能器膜中包含的平均Pb的原子重量比（Pb /（Zr + Ti））由Pb（avg）和Pb中的任何一种的原子量（Pb /（Zr + Ti）） 多个PZT薄膜的层叠界面由Pb（界面）表示，Pb（avg）大于或等于100原子百分比（at％）和小于或等于110原子百分比（at％），以及 层压界面中Pb的波动比＆Dgr; Pb = Pb（avg）-Pb（界面）小于或等于20％。