Invention Grant
US08652297B2 Symmetric VHF plasma power coupler with active uniformity steering
失效
具有有源均匀转向的对称VHF等离子体功率耦合器
- Patent Title: Symmetric VHF plasma power coupler with active uniformity steering
- Patent Title (中): 具有有源均匀转向的对称VHF等离子体功率耦合器
-
Application No.: US13050481Application Date: 2011-03-17
-
Publication No.: US08652297B2Publication Date: 2014-02-18
- Inventor: Kenneth S. Collins , Zhigang Chen , Kartik Ramaswamy , James D. Carducci , Shahid Rauf , Andrew Nguyen
- Applicant: Kenneth S. Collins , Zhigang Chen , Kartik Ramaswamy , James D. Carducci , Shahid Rauf , Andrew Nguyen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Robert M. Wallace
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01J7/24 ; H05B31/26
Abstract:
A coaxial VHF power coupler includes conductive element inside a hollow cylindrical outer conductor of the power coupler and surrounding an axial section of a hollow cylindrical inner conductor of the power coupler. Respective plural motor drives contacting the hollow cylindrical outer conductor are connected to respective locations of the movable conductive element.
Public/Granted literature
- US20120034136A1 SYMMETRIC VHF PLASMA POWER COUPLER WITH ACTIVE UNIFORMITY STEERING Public/Granted day:2012-02-09
Information query
IPC分类:
