Invention Grant
- Patent Title: Thin film transistor and method for manufacturing the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US13256214Application Date: 2010-03-05
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Publication No.: US08653527B2Publication Date: 2014-02-18
- Inventor: Jun Yamada
- Applicant: Jun Yamada
- Applicant Address: JP Tokyo
- Assignee: Konica Minolta Holdings, Inc.
- Current Assignee: Konica Minolta Holdings, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Cozen O'Connor
- Priority: JP2009-061064 20090313
- International Application: PCT/JP2010/053644 WO 20100305
- International Announcement: WO2010/104005 WO 20100916
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/08 ; H01L29/10 ; H01L29/76 ; H01L29/15

Abstract:
Disclosed is a method for manufacturing a thin film transistor in which a semiconductor film in a channel portion is provided between a source electrode and a drain electrode, wherein a partition layer (a bank) can be appropriately formed. The method comprises the steps of: forming two underlying electrodes on an underlying layer; forming a partition layer on the surface of the underlying layer containing the two underlying electrodes so as to surround an area where the source electrode and the drain electrode are to be formed; forming the source electrode and the drain electrode by a plating method on the surfaces of the two underlying electrodes, which are surrounded by the partition layer; and applying semiconductor solution, in which a semiconductor material is dissolved or dispersed, to the area surrounded by the partition layer so that a semiconductor film is formed in the area.
Public/Granted literature
- US20120007092A1 Method for Manufacturing Thin Film Transistor, and Thin Film Transistor Public/Granted day:2012-01-12
Information query
IPC分类: