Invention Grant
- Patent Title: Flash memory and method for fabricating the same
- Patent Title (中): 闪存及其制造方法
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Application No.: US13514591Application Date: 2012-05-22
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Publication No.: US08653574B2Publication Date: 2014-02-18
- Inventor: Ning Cui , Renrong Liang , Jing Wang , Jun Xu
- Applicant: Ning Cui , Renrong Liang , Jing Wang , Jun Xu
- Applicant Address: CN Beijing
- Assignee: Tsinghua University
- Current Assignee: Tsinghua University
- Current Assignee Address: CN Beijing
- Agency: Houtteman Law LLC
- International Application: PCT/CN2012/075901 WO 20120522
- International Announcement: WO2013/120329 WO 20130822
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A flash memory and a method for fabricating the same are provided. The flash memory comprises: a semiconductor substrate; a storage medium layer formed on the semiconductor substrate and comprising from bottom to top: a tunneling oxide layer, a silicon nitride layer and a blocking oxide layer; a semiconductor layer formed on the storage medium layer and comprising a channel region and a source region and a drain region located on both sides of the channel region respectively; and a gate stack formed on the channel region and comprising a gate dielectric and a gate formed on the gate dielectric.
Public/Granted literature
- US20130207173A1 FLASH MEMORY AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-08-15
Information query
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