Invention Grant
- Patent Title: Transferred thin film transistor and method for manufacturing the same
- Patent Title (中): 转移薄膜晶体管及其制造方法
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Application No.: US13775280Application Date: 2013-02-25
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Publication No.: US08653631B2Publication Date: 2014-02-18
- Inventor: Jae Bon Koo , Jong-Hyun Ahn , Seung Youl Kang , Hasan Musarrat , In-Kyu You , Kyoung Ik Cho
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2009-0120621 20091207
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
Provided are a transferred thin film transistor and a method of manufacturing the same. The method includes: forming a source region and a drain region that extend in a first direction in a first substrate and a channel region between the source region and the drain region; forming trenches that extend in a second direction in the first substrate to define an active layer between the trenches, the second direction intersecting the first direction; separating the active layer between the trenches from the first substrate by performing an anisotropic etching process on the first substrate inside the trenches; attaching the active layer on a second substrate; and forming a gate electrode in the first direction on the channel region of the active layer.
Public/Granted literature
- US20130161704A1 TRANSFERRED THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-06-27
Information query
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