Invention Grant
- Patent Title: Measuring method for topography of moving specimen and a measuring apparatus thereof
- Patent Title (中): 移动试件的地形测量方法及其测量装置
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Application No.: US13088069Application Date: 2011-04-15
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Publication No.: US08654353B2Publication Date: 2014-02-18
- Inventor: Shih-Hsuan Kuo , Wei-Cheng Wang
- Applicant: Shih-Hsuan Kuo , Wei-Cheng Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: Morris Manning & Martin LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW99146801A 20101230
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B11/28 ; G01B11/14
Abstract:
A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen.
Public/Granted literature
- US20120170052A1 MEASURING METHOD FOR TOPOGRAPHY OF MOVING SPECIMEN AND A MEASURING APPARATUS THEREOF Public/Granted day:2012-07-05
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