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1.发明授权公开(公告)号：US08325400B2
公开(公告)日：2012-12-04
申请号：US12041128
申请日：2008-03-03
Applicant: Jenq-Shyong Chen , Shih-Hsuan Kuo , Che-Wei Su , Jen-Te Liang
Inventor： Jenq-Shyong Chen , Shih-Hsuan Kuo , Che-Wei Su , Jen-Te Liang
CPC classification number: G03H1/0866 , G03H1/0443 , G03H2001/0445 , G03H2001/0875 , G03H2222/18
Abstract: A multi-color off-axis digital holographic system and the imaging method thereof are disclosed. The multi-color off-axis digital holographic system comprises: a plurality of light emitting diodes, for provide a red (R) beam, a green (G) beam and a blue (B) beam; an interference object lens module, for receiving the R, G, and B beams to generate a beam containing an interference signal; a color imaging device, for receiving the beam containing the interference signal and thus forming a hologram on a surface of the color imaging device by holographic interference while registering the hologram; and a processing device, for receiving the registered hologram form the color imaging device; wherein the processing device perform a zero-filling and reconstructing operations upon the received hologram to obtain phase information of the R, G and B beams. With the aforesaid system, a three-dimensional surface profile with respect to a RG synthetic wavelength is obtained according to a calculation using the phase information of the R and G beams as well as the wavelengths thereof, and similarly, a three-dimensional surface profile with respect to a GB synthetic wavelength is obtained according to a calculation using the phase information of the G and B beams as well as the wavelengths thereof. Thereafter, by performing a calculation using the RG synthetic wavelength and its phase as well as the GB synthetic wavelength and its phase, an overall three-dimensional surface profile with respect to a complete synthetic wavelength is obtained.
Abstract translation: 公开了一种多色离轴数字全息系统及其成像方法。 多色离轴数字全息系统包括：多个发光二极管，用于提供红色（R）光束，绿色（G）光束和蓝色（B）光束; 干涉物镜模块，用于接收R，G和B波束以产生包含干扰信号的波束; 彩色成像装置，用于接收含有干涉信号的光束，从而在记录全息图的同时通过全息干涉在彩色成像装置的表面上形成全息图; 以及处理装置，用于从所述彩色成像装置接收登记的全息图; 其中所述处理装置对所接收的全息图执行零填充和重建操作，以获得R，G和B波束的相位信息。 利用上述系统，根据使用R和G光束的相位信息及其波长的计算，获得相对于RG合成波长的三维表面轮廓，并且类似地，三维表面轮廓 根据使用G和B波束的相位信息以及其波长的计算，获得关于GB合成波长的信号。 此后，通过使用RG合成波长及其相位以及GB合成波长及其相位进行计算，得到相对于完整合成波长的总体三维表面轮廓。
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公开(公告)号：US07986402B2
公开(公告)日：2011-07-26
申请号：US12463407
申请日：2009-05-10
Applicant: Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
Inventor： Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
CPC classification number: G01B11/245 , G01B11/272
Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.
Abstract translation: 三维轮廓检查装置包括至少两个光学检查装置和倾斜角度调节机构。 倾斜角度调节机构配备有至少两个光学检查装置，以便调整至少两个光学检查装置的倾斜角度。 当光学检查装置的倾斜角度改变时，光学检查装置的焦点保持在单个位置，并且被检查对象在光学检查装置的视野内。 可以通过构建由两个光学检查装置收集的图像来获得被摄体的三维轮廓。
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公开(公告)号：US20110157458A1
公开(公告)日：2011-06-30
申请号：US12835521
申请日：2010-07-13
Applicant: JIN-LIANG CHEN , Chun-Chieh Wang , Hau-Wei Wang , Shih-Hsuan Kuo , Leh-Rong Chang , Huang-Wen Lai
Inventor： JIN-LIANG CHEN , Chun-Chieh Wang , Hau-Wei Wang , Shih-Hsuan Kuo , Leh-Rong Chang , Huang-Wen Lai
CPC classification number: G01J3/02 , G01J3/0237 , G01J3/027 , G01J3/0278 , G02B5/28
Abstract: The present disclosure provides a method and system for focusing, which modulates a broadband light into a dispersive light having a higher dispersion characteristic and a lower dispersion characteristic, and the dispersion light is projected onto an object so as to form an object light. By means of the filtering and dividing procedure, a first optical spectrum of the dispersion light with respect to the higher dispersion characteristic is utilized to detect a height information of the surface profile of the object. Then, according to the height information, a second optical spectrum of the dispersion light with respect to the lower dispersion characteristic is adjusted to focus onto the object so that an imaging sensing device is capable of sensing the object light with respect to the lower dispersion characteristic, and thereby obtaining a clear and focusing image corresponding to the surface of the object.
Abstract translation: 本公开内容提供了一种用于聚焦的方法和系统，其将宽带光调制成具有较高色散特性和较低色散特性的色散光，并且将色散光投射到物体上以形成物体光。 通过滤波和分割过程，利用相对于较高色散特性的色散光的第一光谱来检测物体的表面轮廓的高度信息。 然后，根据高度信息，调整相对于较低色散特性的色散光的第二光谱，以聚焦在物体上，使得成像感测装置能够相对于较低色散特性感测物体光 ，从而获得与对象的表面对应的清晰和聚焦图像。
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公开(公告)号：US06913237B2
公开(公告)日：2005-07-05
申请号：US10709709
申请日：2004-05-24
Applicant: Wei-Szu Lin , Shih-Hsuan Kuo , Chi-Chui Yun
Inventor： Wei-Szu Lin , Shih-Hsuan Kuo , Chi-Chui Yun
CPC classification number: F16M11/043 , F16M11/12 , F16M11/18 , F16M2200/04 , G02B7/004
Abstract: A multi-axis adjusting apparatus includes a base seat, and an adjusting seat, a sliding seat and a rotating seat installed in a sequence on the base seat. A plurality of worm and worm gears are used to control the adjusting seat, and guiding slots and guiding pillars are used to cooperatively guide the sliding seat and the rotating seat. Besides, adjusting elements for controlling adjustments are screwed at one side of the seats. Whereby, an optical engine is driven to process multi-dimensional linear and rotating movements.
Abstract translation: 多轴调节装置包括基座，调整座，滑动座和旋转座，依次安装在基座上。 使用多个蜗杆和蜗轮来控制调节座，并且引导槽和引导柱用于协调地引导滑动座和旋转座。 此外，用于控制调节的调节元件被拧在座椅的一侧。 由此，驱动光学引擎来处理多维线性和旋转运动。
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5.发明授权Measuring method for topography of moving specimen and a measuring apparatus thereof 有权移动试件的地形测量方法及其测量装置公开(公告)号：US08654353B2
公开(公告)日：2014-02-18
申请号：US13088069
申请日：2011-04-15
Applicant: Shih-Hsuan Kuo , Wei-Cheng Wang
Inventor： Shih-Hsuan Kuo , Wei-Cheng Wang
CPC classification number: G01B11/0691 , G01B11/24 , G01B11/245
Abstract: A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen.
Abstract translation: 公开了一种移动试样的形貌测量方法及其测量装置，该测量模块与测试样本一起移动以使测试样本和测量模块的相对速度变窄，使得测量模块能够具有足够的发光 强度信号在同一时间位置，测量样品的形貌或厚度。
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Patent Agency Ranking
公开(公告)号：USRE43925E1
公开(公告)日：2013-01-15
申请号：US13461898
申请日：2012-05-02
Applicant: Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
Inventor： Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
CPC classification number: G01B11/245 , G01B11/272
Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.
Abstract translation: 三维轮廓检查装置包括至少两个光学检查装置和倾斜角度调节机构。 倾斜角度调节机构配备有至少两个光学检查装置，以便调整至少两个光学检查装置的倾斜角度。 当光学检查装置的倾斜角度改变时，光学检查装置的焦点保持在单个位置，并且被检查对象在光学检查装置的视野内。 可以通过构建由两个光学检查装置收集的图像来获得被摄体的三维轮廓。
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7.发明申请公开(公告)号：US20120170052A1
公开(公告)日：2012-07-05
申请号：US13088069
申请日：2011-04-15
Applicant: Shih-Hsuan Kuo , Wei-Cheng Wang
Inventor： Shih-Hsuan Kuo , Wei-Cheng Wang
IPC: G01B11/24
CPC classification number: G01B11/0691 , G01B11/24 , G01B11/245
Abstract: A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen.
Abstract translation: 公开了一种移动试样的形貌测量方法及其测量装置，该测量模块与测试样本一起移动以使测试样本和测量模块的相对速度变窄，使得测量模块能够具有足够的发光 强度信号在同一时间位置，测量样品的形貌或厚度。
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8.发明申请公开(公告)号：US20100321773A1
公开(公告)日：2010-12-23
申请号：US12647903
申请日：2009-12-28
Applicant: Liang-Chia Chen , Shih-Hsuan Kuo , Cheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
Inventor： Liang-Chia Chen , Shih-Hsuan Kuo , Cheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
CPC classification number: G02B21/0068 , G01B11/2513 , G01B11/2527 , G02B21/0032
Abstract: A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.
Abstract translation: 在本公开中提供了一种用于三维偏振的共焦显微镜的方法和系统，用于分析物体的表面轮廓。 在本公开中，由光栅形成的线偏振结构光投影在物体底层轮廓测量上。 通过一组偏振器和移动结构光的步骤，使用共焦原理获得关于与物体相关联的不同图像获取位置的一系列图像。 接下来，获得分别对应于每个图像的多个检查像素的多个聚焦指标，用于形成相对于测量深度的聚焦曲线，并获得与每个深度响应曲线相关联的峰值。 最后，获得相对于每个深度响应曲线的峰值的深度位置，用于重构对象的表面轮廓。
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公开(公告)号：US20100128285A1
公开(公告)日：2010-05-27
申请号：US12463407
申请日：2009-05-10
Applicant: Wei Cheng WANG , Shih Hsuan Kuo , Jin Liang Chen
Inventor： Wei Cheng WANG , Shih Hsuan Kuo , Jin Liang Chen
IPC: G01B11/24
CPC classification number: G01B11/245 , G01B11/272
Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.
Abstract translation: 三维轮廓检查装置包括至少两个光学检查装置和倾斜角度调节机构。 倾斜角度调节机构配备有至少两个光学检查装置，以便调整至少两个光学检查装置的倾斜角度。 当光学检查装置的倾斜角度改变时，光学检查装置的焦点保持在单个位置，并且被检查对象在光学检查装置的视野内。 可以通过构建由两个光学检查装置收集的图像来获得被摄体的三维轮廓。
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10.发明申请公开(公告)号：US20090147334A1
公开(公告)日：2009-06-11
申请号：US12041128
申请日：2008-03-03
Applicant: Jenq-Shyong Chen , Shih-Hsuan Kuo , Che-Wei Su , Jen-Te Liang
Inventor： Jenq-Shyong Chen , Shih-Hsuan Kuo , Che-Wei Su , Jen-Te Liang
IPC: G03H1/22
CPC classification number: G03H1/0866 , G03H1/0443 , G03H2001/0445 , G03H2001/0875 , G03H2222/18
Abstract: A multi-color off-axis digital holographic system and the imaging method thereof are disclosed. The multi-color off-axis digital holographic system comprises: a plurality of light emitting diodes, for provide a red (R) beam, a green (G) beam and a blue (B) beam; an interference object lens module, for receiving the R, G, and B beams to generate a beam containing an interference signal; a color imaging device, for receiving the beam containing the interference signal and thus forming a hologram on a surface of the color imaging device by holographic interference while registering the hologram; and a processing device, for receiving the registered hologram form the color imaging device; wherein the processing device perform a zero-filling and reconstructing operations upon the received hologram to obtain phase information of the R, G and B beams. With the aforesaid system, a three-dimensional surface profile with respect to a RG synthetic wavelength is obtained according to a calculation using the phase information of the R and G beams as well as the wavelengths thereof, and similarly, a three-dimensional surface profile with respect to a GB synthetic wavelength is obtained according to a calculation using the phase information of the G and B beams as well as the wavelengths thereof. Thereafter, by performing a calculation using the RG synthetic wavelength and its phase as well as the GB synthetic wavelength and its phase, an overall three-dimensional surface profile with respect to a complete synthetic wavelength is obtained.
Abstract translation: 公开了一种多色离轴数字全息系统及其成像方法。 多色离轴数字全息系统包括：多个发光二极管，用于提供红色（R）光束，绿色（G）光束和蓝色（B）光束; 干涉物镜模块，用于接收R，G和B波束以产生包含干扰信号的波束; 彩色成像装置，用于接收含有干涉信号的光束，从而在记录全息图的同时通过全息干涉在彩色成像装置的表面上形成全息图; 以及处理装置，用于从所述彩色成像装置接收登记的全息图; 其中所述处理装置对所接收的全息图执行零填充和重建操作，以获得R，G和B波束的相位信息。 利用上述系统，根据使用R和G光束的相位信息及其波长的计算，获得相对于RG合成波长的三维表面轮廓，并且类似地，三维表面轮廓 根据使用G和B波束的相位信息以及其波长的计算，获得关于GB合成波长的信号。 此后，通过使用RG合成波长及其相位以及GB合成波长及其相位进行计算，得到相对于完整合成波长的总体三维表面轮廓。
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