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US08654579B2 Non-volatile memory device and method of manufacturing the same 有权
非易失性存储器件及其制造方法

Non-volatile memory device and method of manufacturing the same
Abstract:
A non-volatile memory device includes a plurality of memory cells stacked along a channel protruded from a substrate, a first select transistor connected to one end of the plurality of memory cells, a first interlayer dielectric layer for being coupled between a source line and the first select transistor, and a second interlayer dielectric layer disposed between the first select transistor and the one end of the plurality of memory cells, and configured to include a first recess region.
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