Invention Grant
- Patent Title: Non-volatile memory device and method of manufacturing the same
- Patent Title (中): 非易失性存储器件及其制造方法
-
Application No.: US13298591Application Date: 2011-11-17
-
Publication No.: US08654579B2Publication Date: 2014-02-18
- Inventor: Beom Yong Kim , Kwon Hong , Kee Jeung Lee , Ki Hong Lee
- Applicant: Beom Yong Kim , Kwon Hong , Kee Jeung Lee , Ki Hong Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2010-0115592 20101119
- Main IPC: G11C11/40
- IPC: G11C11/40 ; H01L29/792

Abstract:
A non-volatile memory device includes a plurality of memory cells stacked along a channel protruded from a substrate, a first select transistor connected to one end of the plurality of memory cells, a first interlayer dielectric layer for being coupled between a source line and the first select transistor, and a second interlayer dielectric layer disposed between the first select transistor and the one end of the plurality of memory cells, and configured to include a first recess region.
Public/Granted literature
- US20120126308A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-05-24
Information query