Invention Grant
- Patent Title: In-plane capacitive mems accelerometer
- Patent Title (中): 平面电容mems加速度计
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Application No.: US12982720Application Date: 2010-12-30
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Publication No.: US08656778B2Publication Date: 2014-02-25
- Inventor: Shuwen Guo , Alexander Spivak , Anita Fink
- Applicant: Shuwen Guo , Alexander Spivak , Anita Fink
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Agency: Edwards Wildman Palmer LLP
- Agent Scott D. Wofsy
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass—formed from a single piece of material—movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.
Public/Granted literature
- US20120167685A1 IN-PLANE CAPACITIVE MEMS ACCELEROMETER Public/Granted day:2012-07-05
Information query
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