Invention Grant
- Patent Title: Method and apparatus for processing metal bearing gases
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Application No.: US13336616Application Date: 2011-12-23
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Publication No.: US08658936B2Publication Date: 2014-02-25
- Inventor: William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
- Applicant: William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
- Applicant Address: US MA Andover
- Assignee: MKS Instruments Inc.
- Current Assignee: MKS Instruments Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: B23K10/00
- IPC: B23K10/00 ; H01H1/34
Abstract:
A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
Public/Granted literature
- US08779322B2 Method and apparatus for processing metal bearing gases Public/Granted day:2014-07-15
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