Invention Grant
US08663784B2 Photopatternable imaging layers for controlling block copolymer microdomain orientation
有权
用于控制嵌段共聚物微区取向的光致图像成像层
- Patent Title: Photopatternable imaging layers for controlling block copolymer microdomain orientation
- Patent Title (中): 用于控制嵌段共聚物微区取向的光致图像成像层
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Application No.: US13659824Application Date: 2012-10-24
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Publication No.: US08663784B2Publication Date: 2014-03-04
- Inventor: Padma Gopalan , Eungnak Han
- Applicant: Wisconsin Alumni Research Foundation
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: B32B3/10
- IPC: B32B3/10 ; B32B33/00 ; B05D3/06 ; B32B27/08
Abstract:
The present invention provides structures including a substrate, a crosslinked polymer film disposed over the substrate, and a patterned diblock copolymer film disposed over the crosslinked polymer film. The crosslinked polymer comprises a random copolymer polymerized from a first monomer, a second monomer, and a photo-crosslinkable and/or thermally crosslinkable third monomer, including epoxy-functional or acrylyol-functional monomers. Also disclosed are methods for forming the structures.
Public/Granted literature
- US20130059130A1 PHOTOPATTERNABLE IMAGING LAYERS FOR CONTROLLING BLOCK COPOLYMER MICRODOMAIN ORIENTATION Public/Granted day:2013-03-07
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