Invention Grant
- Patent Title: Through-wafer interconnects for photoimager and memory wafers
- Patent Title (中): 用于光刻机和存储晶圆的晶片间互连
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Application No.: US13940034Application Date: 2013-07-11
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Publication No.: US08669179B2Publication Date: 2014-03-11
- Inventor: Salman Akram , Charles M. Watkins , William M. Hiatt , David R. Hembree , James M. Wark , Warren M. Farnworth , Mark E. Tuttle , Sidney B. Rigg , Steven D. Oliver , Kyle K. Kirby , Alan G. Wood , Lu Velicky
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
Public/Granted literature
- US20130295766A1 THROUGH-WAFER INTERCONNECTS FOR PHOTOIMAGER AND MEMORY WAFERS Public/Granted day:2013-11-07
Information query
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