Invention Grant
US08673193B2 Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet
有权
辊纳米压印装置,用于辊子纳米压印装置的模具辊,用于辊子纳米压印装置的定影辊和纳米压印片的制造方法
- Patent Title: Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet
- Patent Title (中): 辊纳米压印装置,用于辊子纳米压印装置的模具辊,用于辊子纳米压印装置的定影辊和纳米压印片的制造方法
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Application No.: US12734381Application Date: 2008-11-19
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Publication No.: US08673193B2Publication Date: 2014-03-18
- Inventor: Nobuaki Yamada , Akiyoshi Fujii , Hidekazu Hayashi , Tokio Taguchi
- Applicant: Nobuaki Yamada , Akiyoshi Fujii , Hidekazu Hayashi , Tokio Taguchi
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2008-046667 20080227
- International Application: PCT/JP2008/071030 WO 20081119
- International Announcement: WO2009/107294 WO 20090903
- Main IPC: B29C39/14
- IPC: B29C39/14

Abstract:
A roller nanoimprint apparatus is disclosed which is capable of preventing a workpiece film with nanostructures having been transferred from the mold roller from being uneven in thickness and allowing easy replacement of the mold roller. At least one embodiment of the present invention is directed to a roller nanoimprint apparatus including a mold roller and continuously transferring nanosized protrusions to a surface of a workpiece film by rotating the mold roller, wherein the mold roller is a cylindrical body having an outer circumference surface with nanosized recesses formed thereon, the roller nanoimprint apparatus further includes a fluid container having an elastic film inflatable by injecting fluid into the container, the fluid container being arranged in a region defined by an inner circumference surface of the mold roller, the mold roller is mounted or demounted when the elastic film is shrunken, and the mold roller is supported from the inside when the elastic film is inflated.
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