发明授权
- 专利标题: Test pattern selection method for OPC model calibration
- 专利标题(中): OPC模型校准的测试模式选择方法
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申请号: US13594492申请日: 2012-08-24
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公开(公告)号: US08677288B2公开(公告)日: 2014-03-18
- 发明人: Dmitry Vengertsev , Seong-Ho Moon , Artem Shamsuarov , Seung-Hune Yang , Moon-Gyu Jeong
- 申请人: Dmitry Vengertsev , Seong-Ho Moon , Artem Shamsuarov , Seung-Hune Yang , Moon-Gyu Jeong
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2012-0003036 20120110
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A block management method for OPC model calibration includes calculating differences in several different optical functions between first patterns of a first mask and patterns of a second mask corresponding to the first patterns but differing therefrom by a predetermined bias, selecting one or more of the optical functions based on the calculated differences, clustering data of variations in the values of the calculated differences in the selected ones of the optical functions, selecting respective ones of the first patterns in consideration of how the data clusters, and designating the selected first patterns as test patterns.
公开/授权文献
- US20130175240A1 TEST PATTERN SELECTION METHOD FOR OPC MODEL CALIBRATION 公开/授权日:2013-07-11
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