Invention Grant
US08677801B1 Detection and mitigation of aerodynamic error sources for micromachined inertial sensors
有权
微加工惯性传感器的空气动力学误差源的检测和减轻
- Patent Title: Detection and mitigation of aerodynamic error sources for micromachined inertial sensors
- Patent Title (中): 微加工惯性传感器的空气动力学误差源的检测和减轻
-
Application No.: US13774129Application Date: 2013-02-22
-
Publication No.: US08677801B1Publication Date: 2014-03-25
- Inventor: William A. Clark , John A. Geen
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01C19/56
Abstract:
Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing modulated error signals in the accelerometer that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.
Public/Granted literature
- US20140060186A1 Detection and Mitigation of Aerodynamic Error Sources for Micromachined Inertial Sensors Public/Granted day:2014-03-06
Information query
