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公开(公告)号：US20150336790A1
公开(公告)日：2015-11-26
申请号：US14670829
申请日：2015-03-27
申请人： Analog Devices, Inc.
发明人： John A. Geen , George M. Molnar , Gregory S. Davis , Bruce Ma , Kenneth J. Cole , James Timony , Kenneth Flanders
CPC分类号： B81B3/0072 , B81B2203/0118 , B81B2203/0307 , B81C1/00325 , B81C1/00492 , G01C19/5628 , G01P15/0802 , H04R19/005
摘要： Thick (i.e., greater than two microns), fine-grained, low-stress tungsten MEMS structures are fabricated at low temperatures, particularly for so-called “MEMS last” fabrication processes (e.g., when MEMS structures are fabricated after electronic circuitry is fabricated). Means for very accurately etching structural details from the deposited tungsten layer and for strongly and stably anchoring the tungsten layer to an underlying substrate are disclosed. Also, means for removing a sacrificial layer underlying the mobile tungsten layer without damaging the tungsten or allowing it to be drawn down and stuck by surface tension is disclosed.
摘要翻译： 在低温下制造厚（即大于2微米）的细晶粒，低应力钨MEMS结构，特别是对于所谓的“MEMS最后”制造工艺（例如，当MEMS结构在制造电子电路之后制造时） ）。 公开了用于从沉积的钨层非常精确地蚀刻结构细节并且用于将钨层牢固且稳定地锚定到下面的衬底的手段。 此外，公开了用于去除可移动钨层下方的牺牲层而不损坏钨或允许其被表面张力拉下并卡住的装置。
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公开(公告)号：US08555718B2
公开(公告)日：2013-10-15
申请号：US13775849
申请日：2013-02-25
申请人： Analog Devices, Inc.
发明人： Jinbo Kuang , William A. Clark , John A. Geen
CPC分类号： G01C19/56 , G01C19/5677 , G01P15/09 , Y10T29/42
摘要： An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.
摘要翻译： 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。
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公开(公告)号：US20220057208A1
公开(公告)日：2022-02-24
申请号：US17410924
申请日：2021-08-24
申请人： Analog Devices, Inc.
发明人： Igor P. Prikhodko , John A. Geen
IPC分类号： G01C19/5712
摘要： According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.
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公开(公告)号：US20180172445A1
公开(公告)日：2018-06-21
申请号：US15383366
申请日：2016-12-19
申请人： Analog Devices, Inc.
IPC分类号： G01C19/567 , G01C19/5712
CPC分类号： G01C19/574
摘要： Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.
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公开(公告)号：US09709595B2
公开(公告)日：2017-07-18
申请号：US14080370
申请日：2013-11-14
申请人： Analog Devices, Inc.
发明人： Gaurav Vohra , John A. Geen
IPC分类号： G01C19/5698 , G01P15/097 , G01C19/5684 , G01P15/18 , G01P15/125
CPC分类号： G01P15/097 , G01C19/5684 , G01P15/125 , G01P15/18
摘要： A method of detecting motion provides a resonator having a mass, moves the mass in a translational mode, and actuates the mass in a given bulk mode. The mass moves in the translational and given bulk modes at substantially the same time and, accordingly, the resonator is configured to detect linear and rotational movement when moving and actuating the mass in the translational and given bulk modes. The method produces one or more movement signals representing the detected linear and rotational movement.
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公开(公告)号：US20130167642A1
公开(公告)日：2013-07-04
申请号：US13775849
申请日：2013-02-25
申请人： Analog Devices, Inc.
发明人： Jinbo Kuang , William A. Clark , John A. Geen
IPC分类号： G01P15/09
CPC分类号： G01C19/56 , G01C19/5677 , G01P15/09 , Y10T29/42
摘要： An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.
摘要翻译： 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。
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公开(公告)号：US11698257B2
公开(公告)日：2023-07-11
申请号：US17410924
申请日：2021-08-24
申请人： Analog Devices, Inc.
发明人： Igor P. Prikhodko , John A. Geen
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.
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公开(公告)号：US10415968B2
公开(公告)日：2019-09-17
申请号：US15383318
申请日：2016-12-19
申请人： Analog Devices, Inc.
IPC分类号： G01C19/5747 , G01C19/5769 , G01P15/14 , G01C19/574
摘要： Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.
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公开(公告)号：US20130168675A1
公开(公告)日：2013-07-04
申请号：US13775335
申请日：2013-02-25
申请人： Analog Devices, Inc.
发明人： Vineet Kumar , William A. Clark , John A. Geen , Edward Wolfe , Steven Sherman
CPC分类号： B81B7/0029 , B81C1/00333 , B81C99/0045 , G01C19/5776 , H01L22/14
摘要： Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves including MEMS structures that in normal operation are robust against the presence of particles but which can be made sensitive to that presence during a test mode prior to use, e.g., by switching the impedance of sensitive structures between an exceptionally sensitive condition during test and a normal sensitivity during operation; surrounding sensitive nodes with guard elements that are at the same potential as those nodes during operation, thereby offering protection against bridging particles, but are at a very different potential during test and reveal the particles by their resulting leakage currents; extending the sensitive nodes to interdigitate with or otherwise extend adjacent to the guard structures, which neither contribute to nor detract from the device operation but cover otherwise open areas with detection means during test; and/or converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive layers so that the particles can then be moved into detection locations by providing some mechanical disturbance.
摘要翻译： 检测和/或减轻MEMS器件中颗粒污染物的存在涉及包括在正常操作中抵抗颗粒的存在而鲁棒的MEMS结构，但是在使用之前的测试模式期间可以使其对该存在敏感，例如通过切换 在测试期间异常敏感的条件和操作期间的正常灵敏度之间的敏感结构的阻抗; 周围的敏感节点具有在运行期间与那些节点处于相同电位的保护元件，从而提供防止桥接颗粒的保护，但在测试期间处于非常不同的电位并且通过其产生的泄漏电流来显示颗粒; 将敏感节点延伸至与防护结构相邻或以其他方式延伸，其既不影响或不损害设备操作，也不包括在测试期间使用检测装置打开的区域; 和/或转换良性区域，其中在测试期间颗粒可能被电场不可见地捕获到无场区域，通过延伸另外的非功能性导电层，使得随后可以通过提供一些机械干扰将颗粒移动到检测位置。
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公开(公告)号：US11965740B2
公开(公告)日：2024-04-23
申请号：US18320725
申请日：2023-05-19
申请人： Analog Devices, Inc.
发明人： Igor P. Prikhodko , John A. Geen
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.
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