Invention Grant
- Patent Title: Developing method
- Patent Title (中): 开发方法
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Application No.: US13760399Application Date: 2013-02-06
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Publication No.: US08678684B2Publication Date: 2014-03-25
- Inventor: Taro Yamamoto , Kousuke Yoshihara , Yuichi Yoshida
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2009-43136 20090225
- Main IPC: G03D5/00
- IPC: G03D5/00

Abstract:
A method of developing a substrate including rotating the substrate and supplying a developing liquid from a discharge port of a developer nozzle onto the surface of the substrate, while moving the developer nozzle, disposed above the substrate, from a central portion towards a peripheral portion of the substrate, and supplying a first rinse liquid from a discharge port of a first rinse nozzle onto the surface of the substrate, while moving the first rinse nozzle, disposed above the substrate, from the central portion towards the peripheral portion of the substrate. The supplying of the developing liquid and the first rinse liquid are performed concurrently, with the first rinse nozzle being maintained nearer to a center of the substrate than the developer nozzle.
Public/Granted literature
- US20130194557A1 DEVELOPING METHOD Public/Granted day:2013-08-01
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