Invention Grant
US08689633B2 Micromechanical system 有权
微机械系统

Micromechanical system
Abstract:
A micromechanical system includes a first movable element, which is connected to a substrate via a first spring element, and a second movable element, which is connected to the substrate via a second spring element. The first movable element and the second movable element are movable in relation to the substrate independent of one another. Furthermore, the first movable element and the second movable element are situated one above the other in at least some sections in a direction perpendicular to the substrate surface.
Public/Granted literature
Information query
Patent Agency Ranking
0/0