发明授权
- 专利标题: Method for the selective oxidation of silicon nanoparticle semiconductor films in the presence of titanium
- 专利标题(中): 在钛存在下选择性氧化硅纳米颗粒半导体膜的方法
-
申请号: US13433072申请日: 2012-03-28
-
公开(公告)号: US08691672B2公开(公告)日: 2014-04-08
- 发明人: Themistokles Afentakis , Karen Yuri Nishimura
- 申请人: Themistokles Afentakis , Karen Yuri Nishimura
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: B82Y30/00
- IPC分类号: B82Y30/00
摘要:
A method is provided for consuming oxides in a silicon (Si) nanoparticle film. The method forms a colloidal solution film of Si nanoparticles overlying a substrate. The Si nanoparticle colloidal solution film is annealed at a high temperature in the presence of titanium (Ti). In response to the annealing, Si oxide is consumed in a resultant Si nanoparticle film. In one aspect, the consuming the Si oxide in the Si nanoparticle film includes forming Ti oxide in the Si nanoparticle film. Also in response to a low temperature annealing, solvents are evaporated in the colloidal solution film of Si nanoparticles. Si and Ti oxide molecules are sintered in the Si nanoparticle film in response to the high temperature annealing.
公开/授权文献
- US20130256675A1 Method for Consuming Silicon Nanoparticle Film Oxidation 公开/授权日:2013-10-03
信息查询