发明授权
US08691672B2 Method for the selective oxidation of silicon nanoparticle semiconductor films in the presence of titanium 有权
在钛存在下选择性氧化硅纳米颗粒半导体膜的方法

Method for the selective oxidation of silicon nanoparticle semiconductor films in the presence of titanium
摘要:
A method is provided for consuming oxides in a silicon (Si) nanoparticle film. The method forms a colloidal solution film of Si nanoparticles overlying a substrate. The Si nanoparticle colloidal solution film is annealed at a high temperature in the presence of titanium (Ti). In response to the annealing, Si oxide is consumed in a resultant Si nanoparticle film. In one aspect, the consuming the Si oxide in the Si nanoparticle film includes forming Ti oxide in the Si nanoparticle film. Also in response to a low temperature annealing, solvents are evaporated in the colloidal solution film of Si nanoparticles. Si and Ti oxide molecules are sintered in the Si nanoparticle film in response to the high temperature annealing.
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