发明授权
- 专利标题: Group IV metal complexes for metal-containing film deposition
- 专利标题(中): 用于含金属膜沉积的IV族金属络合物
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申请号: US13362077申请日: 2012-01-31
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公开(公告)号: US08691710B2公开(公告)日: 2014-04-08
- 发明人: Wade Hampton Bailey, III , Sergei Vladimirovich Ivanov , Xinjian Lei , Moo-Sung Kim
- 申请人: Wade Hampton Bailey, III , Sergei Vladimirovich Ivanov , Xinjian Lei , Moo-Sung Kim
- 申请人地址: US PA Allentown
- 专利权人: Air Products and Chemicals, Inc.
- 当前专利权人: Air Products and Chemicals, Inc.
- 当前专利权人地址: US PA Allentown
- 代理商 Rosaleen P. Morris-Oskanian
- 主分类号: C07D207/46
- IPC分类号: C07D207/46 ; H01L21/70
摘要:
Metal-containing complexes with general formula (1) (R1nPyr)(R2nPyr)ML1L2; or (2) [(R8XR9)(R1nPyr)(R2nPyr)]ML1L2 are disclosed; wherein M is a Group IV metal, Pyr is pyrrolyl ligand, n=1, 2 and 3, L1 and L2 are independently selected from alkoxide, amide or alkyl, L1 and L2 can be linked together, R1 and R2 can be same or different organic groups substituted at 2,3,4-positions of the pyrrole ring and are selected from the group consisting of linear and branched C1-6 alkyls, R8 and R9 are independently selected from the linear or branched chain alkylene group having 2-6 carbon atoms, and X is CH2 or oxygen. Methods of using the metal complexes as precursors to deposit metal or metal oxide films used for various devices in semi-conductor industries are also discussed.
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