Invention Grant
- Patent Title: Deposition apparatus having thermal hood
- Patent Title (中): 具有热罩的沉积设备
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Application No.: US12196368Application Date: 2008-08-22
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Publication No.: US08709160B2Publication Date: 2014-04-29
- Inventor: James W. Neal , Michael J. Maloney , David A. Litton , Christopher Masucci
- Applicant: James W. Neal , Michael J. Maloney , David A. Litton , Christopher Masucci
- Applicant Address: US CT Hartford
- Assignee: United Technologies Corporation
- Current Assignee: United Technologies Corporation
- Current Assignee Address: US CT Hartford
- Agency: Carlson, Gaskey & Olds, P.C.
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
A deposition apparatus includes a coating chamber and a coating zone within the coating chamber for coating work pieces. A heating source heats the coating zone, and a thermal hood within the coating chamber is located adjacent to the coating zone for controlling a temperature of the coating zone.
Public/Granted literature
- US20100047474A1 DEPOSITION APPARATUS HAVING THERMAL HOOD Public/Granted day:2010-02-25
Information query
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