发明授权
US08709371B2 Method for growing group III-nitride crystals in supercritical ammonia using an autoclave
有权
使用高压釜在超临界氨中生长III族氮化物晶体的方法
- 专利标题: Method for growing group III-nitride crystals in supercritical ammonia using an autoclave
- 专利标题(中): 使用高压釜在超临界氨中生长III族氮化物晶体的方法
-
申请号: US11921396申请日: 2005-07-08
-
公开(公告)号: US08709371B2公开(公告)日: 2014-04-29
- 发明人: Kenji Fujito , Tadao Hashimoto , Shuji Nakamura
- 申请人: Kenji Fujito , Tadao Hashimoto , Shuji Nakamura
- 申请人地址: US CA Oakland JP Kawaguchi, Saitama Prefecture
- 专利权人: The Regents of the University of California,Japan Science and Technology Agency
- 当前专利权人: The Regents of the University of California,Japan Science and Technology Agency
- 当前专利权人地址: US CA Oakland JP Kawaguchi, Saitama Prefecture
- 代理机构: Gates & Cooper LLP
- 国际申请: PCT/US2005/024239 WO 20050708
- 国际公布: WO2007/008198 WO 20070118
- 主分类号: C01B21/06
- IPC分类号: C01B21/06 ; C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
摘要:
A method of growing high-quality, group-III nitride, bulk single crystals. The group III-nitride bulk crystal is grown in an autoclave in supercritical ammonia using a source material or nutrient that is a group III-nitride polycrystals or group-III metal having a grain size of at least 10 microns or more and a seed crystal that is a group-III nitride single crystal. The group III-nitride polycrystals may be recycled from previous ammonothermal process after annealing in reducing gas at more then 600° C. The autoclave may include an internal chamber that is filled with ammonia, wherein the ammonia is released from the internal chamber into the autoclave when the ammonia attains a supercritical state after the heating of the autoclave, such that convection of the supercritical ammonia transfers source materials and deposits the transferred source materials onto seed crystals, but undissolved particles of the source materials are prevented from being transferred and deposited on the seed crystals.
公开/授权文献
信息查询