Invention Grant
- Patent Title: Fabrication method of package structure having MEMS element
- Patent Title (中): 具有MEMS元件的封装结构的制造方法
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Application No.: US13834684Application Date: 2013-03-15
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Publication No.: US08716070B2Publication Date: 2014-05-06
- Inventor: Chi-Hsin Chiu , Chih-Ming Huang , Chang-Yueh Chan , Hsin-Yi Liao , Chun-Chi Ke
- Applicant: Siliconware Precision Industries Co., Ltd.
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co. Ltd.
- Current Assignee: Siliconware Precision Industries Co. Ltd.
- Current Assignee Address: TW Taichung
- Agency: Edwards Wildman Palmer LLP
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW99101443A 20100120
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L31/0203

Abstract:
A fabrication method of a package structure having at least an MEMS element is provided, including: preparing a wafer having electrical connection pads and the at least an MEMS element; disposing lids for covering the at least an MEMS element, the lids having a metal layer formed thereon; electrically connecting the electrical connection pads and the metal layer with bonding wires; forming an encapsulant for covering the lids, bonding wires, electrical connection pads and metal layer; removing portions of the encapsulant to separate the bonding wires each into first and second sub-bonding wires, wherein top ends of the first and second sub-bonding wires are exposed, the first sub-bonding wires electrically connecting to the electrical connection pads, and the second sub-bonding wires electrically connecting to the metal layer; forming metallic traces on the encapsulant for electrically connecting to the first sub-bonding wires; forming bumps on the metallic traces; and performing a singulation process.
Public/Granted literature
- US20130203200A1 FABRICATION METHOD OF PACKAGE STRUCTURE HAVING MEMS ELEMENT Public/Granted day:2013-08-08
Information query
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