发明授权
US08716837B2 Bipolar junction transistors with a link region connecting the intrinsic and extrinsic bases
有权
具有连接内在和外在基极的连接区域的双极结晶体管
- 专利标题: Bipolar junction transistors with a link region connecting the intrinsic and extrinsic bases
- 专利标题(中): 具有连接内在和外在基极的连接区域的双极结晶体管
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申请号: US13758204申请日: 2013-02-04
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公开(公告)号: US08716837B2公开(公告)日: 2014-05-06
- 发明人: Renata Camillo-Castillo , Peter B. Gray , David L. Harame , Alvin J. Joseph , Marwan H. Khater , Qizhi Liu
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Wood, Herron & Evans LLP
- 代理商 Anthony J. Canale
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/331
摘要:
Methods for fabricating bipolar junction transistors, bipolar junction transistors made by the methods, and design structures for a bipolar junction transistor. The bipolar junction transistor includes a dielectric layer on an intrinsic base and an extrinsic base at least partially separated from the intrinsic base by the dielectric layer. An emitter opening extends through the extrinsic base and the dielectric layer. The dielectric layer is recessed laterally relative to the emitter opening to define a cavity between the intrinsic base and the extrinsic base. The cavity is filled with a semiconductor layer that physically links the extrinsic base and the intrinsic base together.
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