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US08728942B2 Method for producing epitaxial silicon wafer 有权
外延硅晶片的制造方法

Method for producing epitaxial silicon wafer
Abstract:
Mirror-polishing a front surface of a silicon wafer using polishing liquid composed of an abrasive grain-free alkaline solution including water-soluble polymers simplifies a polishing process, thus leading to an increase in productivity and a reduction in cost, and reduces the density of LPDs attributable to processing and occurring in the front surface of a mirror-polished wafer, thus improving the surface roughness of the wafer front surface.
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