Invention Grant
- Patent Title: Wafer level package and a method of forming a wafer level package
- Patent Title (中): 晶圆级封装以及形成晶片级封装的方法
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Application No.: US13497611Application Date: 2009-09-25
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Publication No.: US08729695B2Publication Date: 2014-05-20
- Inventor: Chirayarikathu Veedu Sankarapillai Premachandran , Rakesh Kumar , Nagarajan Ranganathan , Won Kyoung Choi , Ebin Liao , Yasuyuki Mitsuoka , Hiroshi Takahashi , Ryuta Mitsusue
- Applicant: Chirayarikathu Veedu Sankarapillai Premachandran , Rakesh Kumar , Nagarajan Ranganathan , Won Kyoung Choi , Ebin Liao , Yasuyuki Mitsuoka , Hiroshi Takahashi , Ryuta Mitsusue
- Applicant Address: SG Singapore JP Chiba
- Assignee: Agency for Science, Technology and Research,Seiko Instruments, Inc.
- Current Assignee: Agency for Science, Technology and Research,Seiko Instruments, Inc.
- Current Assignee Address: SG Singapore JP Chiba
- Agency: Crockett & Crockett, PC
- Agent K. David Crockett, Esq.; Niky Economy Syrengelas, Esq.
- International Application: PCT/SG2009/000355 WO 20090925
- International Announcement: WO2011/037534 WO 20110331
- Main IPC: H01L23/12
- IPC: H01L23/12 ; H01L21/00

Abstract:
In an embodiment, a wafer level package may be provided. The wafer level package may include a device wafer including a MEMS device, a cap wafer disposed over the device wafer, at least one first interconnect disposed between the device wafer and the cap wafer and configured to provide an electrical connection between the device wafer and the cap wafer, and a conformal sealing ring disposed between the device wafer and the cap wafer and configured to surround the at least one first interconnect and the MEMS device so as to provide a conformally sealed environment for the at least one first interconnect and the MEMS device, wherein the conformal sealing ring may be configured to conform to a respective suitable surface of the device wafer and the cap wafer when the device wafer may be bonded to the cap wafer. A method of forming a wafer level package may also be provided.
Public/Granted literature
- US20130020713A1 Wafer Level Package and a Method of Forming a Wafer Level Package Public/Granted day:2013-01-24
Information query
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