发明授权
- 专利标题: Wafer level package and a method of forming a wafer level package
- 专利标题(中): 晶圆级封装以及形成晶片级封装的方法
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申请号: US13497611申请日: 2009-09-25
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公开(公告)号: US08729695B2公开(公告)日: 2014-05-20
- 发明人: Chirayarikathu Veedu Sankarapillai Premachandran , Rakesh Kumar , Nagarajan Ranganathan , Won Kyoung Choi , Ebin Liao , Yasuyuki Mitsuoka , Hiroshi Takahashi , Ryuta Mitsusue
- 申请人: Chirayarikathu Veedu Sankarapillai Premachandran , Rakesh Kumar , Nagarajan Ranganathan , Won Kyoung Choi , Ebin Liao , Yasuyuki Mitsuoka , Hiroshi Takahashi , Ryuta Mitsusue
- 申请人地址: SG Singapore JP Chiba
- 专利权人: Agency for Science, Technology and Research,Seiko Instruments, Inc.
- 当前专利权人: Agency for Science, Technology and Research,Seiko Instruments, Inc.
- 当前专利权人地址: SG Singapore JP Chiba
- 代理机构: Crockett & Crockett, PC
- 代理商 K. David Crockett, Esq.; Niky Economy Syrengelas, Esq.
- 国际申请: PCT/SG2009/000355 WO 20090925
- 国际公布: WO2011/037534 WO 20110331
- 主分类号: H01L23/12
- IPC分类号: H01L23/12 ; H01L21/00
摘要:
In an embodiment, a wafer level package may be provided. The wafer level package may include a device wafer including a MEMS device, a cap wafer disposed over the device wafer, at least one first interconnect disposed between the device wafer and the cap wafer and configured to provide an electrical connection between the device wafer and the cap wafer, and a conformal sealing ring disposed between the device wafer and the cap wafer and configured to surround the at least one first interconnect and the MEMS device so as to provide a conformally sealed environment for the at least one first interconnect and the MEMS device, wherein the conformal sealing ring may be configured to conform to a respective suitable surface of the device wafer and the cap wafer when the device wafer may be bonded to the cap wafer. A method of forming a wafer level package may also be provided.
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