发明授权
- 专利标题： High efficiency solar cells fabricated by inexpensive PECVD
- 专利标题（中）： 由廉价PECVD制造的高效太阳能电池
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申请号： US13535812申请日： 2012-06-28
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公开(公告)号： US08735210B2公开(公告)日： 2014-05-27
- 发明人: Keith E. Fogel , Augustin J. Hong , Jeehwan Kim , Devendra K. Sadana
- 申请人： Keith E. Fogel , Augustin J. Hong , Jeehwan Kim , Devendra K. Sadana
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Tutunjian & Bitetto, P.C.
- 代理商 Louis J. Percello
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method for forming a photovoltaic device includes depositing one or more layers of a photovoltaic stack on a substrate by employing a high deposition rate plasma enhanced chemical vapor deposition (HDR PECVD) process. Contacts are formed on the photovoltaic stack to provide a photovoltaic cell. Annealing is performed on the photovoltaic cell at a temperature and duration configured to improve overall performance.
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