发明授权
US08742594B2 Structure and method of making an offset-trench crackstop that forms an air gap adjacent to a passivated metal crackstop
有权
制造偏移沟槽裂缝的结构和方法,其形成与钝化金属裂缝相邻的气隙
- 专利标题: Structure and method of making an offset-trench crackstop that forms an air gap adjacent to a passivated metal crackstop
- 专利标题(中): 制造偏移沟槽裂缝的结构和方法,其形成与钝化金属裂缝相邻的气隙
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申请号: US13615960申请日: 2012-09-14
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公开(公告)号: US08742594B2公开(公告)日: 2014-06-03
- 发明人: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- 申请人: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb & Riley, LLC
- 代理商 David A. Cain, Esq.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
A structure and method of making an offset-trench crackstop, which forms an air gap in a passivation layer that is adjacent to a passivated top metal layer of a metal crackstop in an integrated circuit (IC) die. The offset-trench crackstop may expose a portion of a topmost dielectric layer in the crackstop region, not expose a topmost patterned metal layer of the metal crackstop, and may be interposed between the metal crackstop and an active device region. Alternatively, the offset-trench crackstop may expose a portion of the topmost dielectric layer, which separates an outermost metal layer and an innermost metal layer of the metal crackstop, and does not expose any of the topmost patterned metal layer of the metal crackstop, where the innermost metal layer of the metal crackstop is interposed between the offset-trench crackstop in the crackstop region and the active device region of the IC die.
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