发明授权
- 专利标题： Perpendicular magnetic recording media with oxide-containing exchange coupling layer
- 专利标题（中）： 具有氧化物交换耦合层的垂直磁记录介质
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申请号： US13438804申请日： 2012-04-03
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公开(公告)号： US08747628B2公开(公告)日： 2014-06-10
- 发明人: Xiaoping Bian , Jack Jyh-Kau Chang , Qing Dai , Hoa V. Do , Yoshihiro Ikeda , Kentaro Takano , Chu S. Tran
- 申请人： Xiaoping Bian , Jack Jyh-Kau Chang , Qing Dai , Hoa V. Do , Yoshihiro Ikeda , Kentaro Takano , Chu S. Tran
- 申请人地址： NL Amsterdam
- 专利权人： HGST Netherlands B.V.
- 当前专利权人： HGST Netherlands B.V.
- 当前专利权人地址： NL Amsterdam
- 代理机构： Zilka-Kotab, PC
- 主分类号： C23C14/08
- IPC分类号： C23C14/08
摘要：
A method according to one embodiment includes forming a high Ku first oxide magnetic layer above a substrate by sputtering; forming a low Ku second oxide magnetic layer above the first oxide magnetic layer by sputtering; forming an exchange coupling layer of CoCrPt-oxide above the second oxide magnetic layer; and forming a magnetic cap layer above the exchange coupling layer. Additional systems and methods are also presented.
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