发明授权
- 专利标题: Method of manufacturing a ladder filter
- 专利标题(中): 制造梯形过滤器的方法
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申请号: US12647794申请日: 2009-12-28
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公开(公告)号: US08756777B2公开(公告)日: 2014-06-24
- 发明人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
- 申请人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
- 申请人地址: JP Tokyo
- 专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Chen Yoshimura LLP
- 优先权: JP2006-282290 20061017
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; H03H9/205 ; H03H9/56 ; H03H9/64 ; H03H9/15 ; H03H9/17 ; H03H9/54 ; H03H9/60 ; H03H3/00 ; H03H3/007
摘要:
A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.
公开/授权文献
- US20100096358A1 LADDER TYPE FILTER 公开/授权日:2010-04-22
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