Invention Grant
- Patent Title: Servicing a plasma processing system with a robot
- Patent Title (中): 用机器人维修等离子体处理系统
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Application No.: US12569674Application Date: 2009-09-29
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Publication No.: US08764907B2Publication Date: 2014-07-01
- Inventor: Andrew D. Bailey, III
- Applicant: Andrew D. Bailey, III
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: B23P6/00
- IPC: B23P6/00 ; B23P19/04

Abstract:
A method for servicing a plasma processing system. The plasma processing system may include a plasma chamber. The plasma chamber may include a top piece and a bottom piece, wherein the top piece may be disposed above the bottom piece. The method may include using a robot device to control a lift mechanism to lift the top piece from the bottom piece. The method may also include extending a first member of the robot device into the top piece to perform a first set of tasks according to a first set of service procedures. The method may also include extending a second member of the robot device into the bottom piece to perform a second set of tasks according to a second set of service procedures.
Public/Granted literature
- US20100024186A1 SERVICING A PLASMA PROCESSING SYSTEM WITH A ROBOT Public/Granted day:2010-02-04
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