发明授权
US08765559B2 Sophisticated gate electrode structures formed by cap layer removal with reduced loss of embedded strain-inducing semiconductor material 有权
通过盖层去除形成的复杂的栅极电极结构,并减少嵌入的应变诱导半导体材料的损耗

Sophisticated gate electrode structures formed by cap layer removal with reduced loss of embedded strain-inducing semiconductor material
摘要:
When forming sophisticated gate electrode structures, such as high-k metal gate electrode structures, an appropriate encapsulation may be achieved, while also undue material loss of a strain-inducing semiconductor material that is provided in one type of transistor may be avoided. To this end, the patterning of the protective spacer structure prior to depositing the strain-inducing semiconductor material may be achieved for each type of transistor on the basis of the same process flow, while, after the deposition of the strain-inducing semiconductor material, an etch stop layer may be provided so as to preserve integrity of the active regions.
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