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    Sophisticated gate electrode structures formed by cap layer removal with reduced loss of embedded strain-inducing semiconductor material
    1.
    发明授权
    Sophisticated gate electrode structures formed by cap layer removal with reduced loss of embedded strain-inducing semiconductor material 有权
    通过盖层去除形成的复杂的栅极电极结构，并减少嵌入的应变诱导半导体材料的损耗

    公开(公告)号：US08765559B2

    公开(公告)日：2014-07-01

    申请号：US13358101

    申请日：2012-01-25

    申请人： Stephan Kronholz ,  Gunda Beernink ,  Markus Lenski ,  Frank Seliger ,  Frank Richter

    发明人： Stephan Kronholz ,  Gunda Beernink ,  Markus Lenski ,  Frank Seliger ,  Frank Richter

    IPC分类号： H01L21/336

    CPC分类号： H01L21/823807 ,  H01L21/823814

    摘要： When forming sophisticated gate electrode structures, such as high-k metal gate electrode structures, an appropriate encapsulation may be achieved, while also undue material loss of a strain-inducing semiconductor material that is provided in one type of transistor may be avoided. To this end, the patterning of the protective spacer structure prior to depositing the strain-inducing semiconductor material may be achieved for each type of transistor on the basis of the same process flow, while, after the deposition of the strain-inducing semiconductor material, an etch stop layer may be provided so as to preserve integrity of the active regions.

    摘要翻译： 当形成诸如高k金属栅电极结构的复杂的栅电极结构时，可以实现适当的封装，同时也可以避免在一种晶体管中提供的应变诱导半导体材料的不适当的材料损耗。 为此，可以在沉积应变诱导半导体材料之前对保护间隔物结构进行图案化，其基于相同的工艺流程，对于每种类型的晶体管，在应变诱导半导体材料沉积之后， 可以提供蚀刻停止层，以便保持活性区域的完整性。

    Sophisticated Gate Electrode Structures Formed by Cap Layer Removal with Reduced Loss of Embedded Strain-Inducing Semiconductor Material
    2.
    发明申请
    Sophisticated Gate Electrode Structures Formed by Cap Layer Removal with Reduced Loss of Embedded Strain-Inducing Semiconductor Material 有权
    通过盖层去除形成的复杂的门极电极结构，减少嵌入式应变诱导半导体材料的损耗

    公开(公告)号：US20120196417A1

    公开(公告)日：2012-08-02

    申请号：US13358101

    申请日：2012-01-25

    申请人： Stephan Kronholz ,  Gunda Beernink ,  Markus Lenski ,  Frank Seliger ,  Frank Richter

    发明人： Stephan Kronholz ,  Gunda Beernink ,  Markus Lenski ,  Frank Seliger ,  Frank Richter

    IPC分类号： H01L21/8234

    CPC分类号： H01L21/823807 ,  H01L21/823814

    摘要： When forming sophisticated gate electrode structures, such as high-k metal gate electrode structures, an appropriate encapsulation may be achieved, while also undue material loss of a strain-inducing semiconductor material that is provided in one type of transistor may be avoided. To this end, the patterning of the protective spacer structure prior to depositing the strain-inducing semiconductor material may be achieved for each type of transistor on the basis of the same process flow, while, after the deposition of the strain-inducing semiconductor material, an etch stop layer may be provided so as to preserve integrity of the active regions.

    摘要翻译： 当形成诸如高k金属栅电极结构的复杂的栅电极结构时，可以实现适当的封装，同时也可以避免在一种晶体管中提供的应变诱导半导体材料的不适当的材料损耗。 为此，可以在沉积应变诱导半导体材料之前对保护间隔物结构进行图案化，其基于相同的工艺流程，对于每种类型的晶体管，在应变诱导半导体材料沉积之后， 可以提供蚀刻停止层，以便保持活性区域的完整性。

    Corner rounding in a replacement gate approach based on a sacrificial fill material applied prior to work function metal deposition
    3.
    发明授权
    Corner rounding in a replacement gate approach based on a sacrificial fill material applied prior to work function metal deposition 有权
    基于在工作功能金属沉积之前施加的牺牲填充材料，在替代浇口方法中的圆角

    公开(公告)号：US07951677B2

    公开(公告)日：2011-05-31

    申请号：US12894985

    申请日：2010-09-30

    申请人： Jens Heinrich ,  Thomas Werner ,  Frank Seliger ,  Frank Richter

    发明人： Jens Heinrich ,  Thomas Werner ,  Frank Seliger ,  Frank Richter

    IPC分类号： H01L21/336

    CPC分类号： H01L21/82385 ,  H01L21/28088 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/4966 ,  H01L29/66545 ,  H01L29/66583 ,  H01L29/7833

    摘要： In a replacement gate approach, a top area of a gate opening has a superior cross-sectional shape which is accomplished on the basis of a plasma assisted etch process or an ion sputter process. During the process, a sacrificial fill material protects sensitive materials, such as a high-k dielectric material and a corresponding cap material. Consequently, the subsequent deposition of a work function adjusting material layer may not result in a surface topography which may result in a non-reliable filling-in of the electrode metal. In some illustrative embodiments, the sacrificial fill material may also be used as a deposition mask for avoiding the deposition of the work function adjusting metal in certain gate openings in which a different type of work function adjusting species is required.

    摘要翻译： 在替代栅极方法中，栅极开口的顶部区域具有优异的横截面形状，其基于等离子体辅助蚀刻工艺或离子溅射工艺来实现。 在该过程中，牺牲填充材料保护敏感材料，例如高k电介质材料和对应的帽材料。 因此，随后的功函调整材料层的沉积可能不会导致表面形貌，这可能导致不可靠地填充电极金属。 在一些说明性实施例中，牺牲填充材料也可以用作沉积掩模，以避免功能调节金属沉积在需要不同类型的功能调节物质的某些门开口中。

    CORNER ROUNDING IN A REPLACEMENT GATE APPROACH BASED ON A SACRIFICIAL FILL MATERIAL APPLIED PRIOR TO WORK FUNCTION METAL DEPOSITION
    4.
    发明申请
    CORNER ROUNDING IN A REPLACEMENT GATE APPROACH BASED ON A SACRIFICIAL FILL MATERIAL APPLIED PRIOR TO WORK FUNCTION METAL DEPOSITION 有权
    基于在工作功能金属沉积之前应用的真空填充材料的替代浇口方法中的拐角

    公开(公告)号：US20110104880A1

    公开(公告)日：2011-05-05

    申请号：US12894985

    申请日：2010-09-30

    申请人： Jens Heinrich ,  Thomas Werner ,  Frank Seliger ,  Frank Richter

    发明人： Jens Heinrich ,  Thomas Werner ,  Frank Seliger ,  Frank Richter

    IPC分类号： H01L21/71

    CPC分类号： H01L21/82385 ,  H01L21/28088 ,  H01L21/823835 ,  H01L21/823842 ,  H01L29/4966 ,  H01L29/66545 ,  H01L29/66583 ,  H01L29/7833

    摘要： In a replacement gate approach, a top area of a gate opening has a superior cross-sectional shape which is accomplished on the basis of a plasma assisted etch process or an ion sputter process. During the process, a sacrificial fill material protects sensitive materials, such as a high-k dielectric material and a corresponding cap material. Consequently, the subsequent deposition of a work function adjusting material layer may not result in a surface topography which may result in a non-reliable filling-in of the electrode metal. In some illustrative embodiments, the sacrificial fill material may also be used as a deposition mask for avoiding the deposition of the work function adjusting metal in certain gate openings in which a different type of work function adjusting species is required.

    摘要翻译： 在替代栅极方法中，栅极开口的顶部区域具有优异的横截面形状，其基于等离子体辅助蚀刻工艺或离子溅射工艺来实现。 在该过程中，牺牲填充材料保护敏感材料，例如高k电介质材料和对应的帽材料。 因此，随后的功函调整材料层的沉积可能不会导致表面形貌，这可能导致不可靠地填充电极金属。 在一些说明性实施例中，牺牲填充材料也可以用作沉积掩模，以避免功能调节金属沉积在需要不同类型的功能调节物质的某些门开口中。

    Tracer pin arrangement
    6.
    发明授权
    Tracer pin arrangement 有权
    示踪针排列

    公开(公告)号：US09279441B2

    公开(公告)日：2016-03-08

    申请号：US13822089

    申请日：2011-09-12

    申请人： Frank Richter

    发明人： Frank Richter

    IPC分类号： G01B5/012 ,  F16B17/00 ,  G01B5/016

    CPC分类号： F16B17/00 ,  G01B5/012 ,  G01B5/016 ,  Y10T403/1624

    摘要： The invention relates to an intermediate element for the arrangement of a probe pin with respect to the probe pin carrier of a coordinate measuring machine, having a single-piece base body with a probe pin end and a machine end. It is provided here that the machine end is provided with a coupling element and with a means for ensuring a reproducible rotational alignment, and the probe pin end has a bearing face which is inclined in a fixed manner with respect to the axis of the coupling element, is provided on a general ball segment form which is flattened by the bearing face, and is configured with a positively locking means and/or frictional means for the positively locking and/or frictional engagement with a fastening end of the probe pin in contact with the bearing face.

    摘要翻译： 本发明涉及一种中间元件，用于相对于坐标测量机的探针销托架布置探针，其具有带探头针端和机器端的单片基体。 这里提供的是机器端设置有联接元件和用于确保可再现的旋转对准的装置，并且探针销端部具有相对于联接元件的轴线以固定的方式倾斜的支承面 设置在由支承面平坦化的一般的球形体上，并且构造有用于与探针的紧固端积极锁定和/或摩擦接合的可靠锁定装置和/或摩擦装置， 轴承面。

    Metering device
    7.
    发明授权
    Metering device 有权
    计量装置

    公开(公告)号：US09237987B2

    公开(公告)日：2016-01-19

    申请号：US13988474

    申请日：2011-11-11

    申请人： Thomas Jakob ,  Frank Skaper ,  Thorsten Kellner ,  Frank Richter

    发明人： Thomas Jakob ,  Frank Skaper ,  Thorsten Kellner ,  Frank Richter

    IPC分类号： A61J1/00 ,  A61J7/00 ,  A61M5/19 ,  A45D34/04 ,  A61M5/315 ,  A45D40/20 ,  A61M5/31 ,  B65D81/32

    CPC分类号： A61M5/31596 ,  A45D34/04 ,  A45D2040/207 ,  A45D2040/208 ,  A45D2200/054 ,  A45D2200/055 ,  A61J1/2031 ,  A61J7/0053 ,  A61M5/19 ,  A61M2005/3125 ,  A61M2005/3126 ,  A61M2005/3128 ,  A61M2005/31598 ,  B65D81/325 ,  B65D81/3255

    摘要： A metering device is used for the metered administration of a flowable preparation together with a flowable carrier medium. A storage container for the preparation has at least one access opening. A metering plunger body can be moved in a sealed manner in the storage container between a starting position and at least one metering position. The metering plunger body is hollow. A metering sleeve has on a bottom side an eccentric metering sleeve opening. An inner plunger body has on the bottom side an eccentrically arranged plunger body opening. In a through relative rotation position of the metering sleeve relative to the inner plunger body a passage is provided between the inside of the storage container and the inside of the inner plunger body. In a closed relative rotational position this passage is closed. This results in a user-friendly and compact metering device.

    摘要翻译： 计量装置用于可流动制剂与可流动载体介质的计量管理。 用于制备的储存容器具有至少一个进入口。 计量柱塞体可以密封地移动到存储容​​器中，在开始位置和至少一个计量位置之间。 计量柱塞体是中空的。 测量套筒在底侧具有偏心的计量套筒开口。 内柱塞体在底侧具有偏心布置的柱塞体开口。 在计量套筒相对于内柱塞体的通过相对旋转位置，在储存容器的内部和内柱塞体的内部之间设有通道。 在封闭的相对旋转位置，该通道是封闭的。 这导致用户友好和紧凑的计量装置。

    Eliciting a blood sample
    8.
    发明授权
    Eliciting a blood sample 有权
    引起血液样本

    公开(公告)号：US08684950B2

    公开(公告)日：2014-04-01

    申请号：US13809041

    申请日：2011-07-07

    申请人： Ross MacArthur ,  Frank Richter

    发明人： Ross MacArthur ,  Frank Richter

    IPC分类号： A61B5/00

    CPC分类号： A61B5/157 ,  A61B5/1468 ,  A61B5/150061 ,  A61B5/150358 ,  A61B5/151 ,  A61B5/15146

    摘要： Apparatus for eliciting a blood sample comprises: a housing; a shaft mounted within the housing; an aperture in the housing, the aperture being configured to receive a part of a user; a member rotatably mounted on the shaft; a lancet protruding from one position at an edge of the member, and a blood collection part located at a second, different position at the edge of the member. The apparatus is configured such that: when the member is in a first rotational position the lancet is shielded by the housing, when the member is in a second rotational position the lancet is operable to lance the part of the user received at the aperture, and when the member is in a third rotational position the blood collection part is presented such as to receive blood from the part of the user received at the aperture.

    摘要翻译： 用于引发血液样本的装置包括：壳体; 安装在所述壳体内的轴; 壳体中的孔，所述孔被配置为接收使用者的一部分; 可旋转地安装在轴上的构件; 在构件的边缘处从一个位置突出的柳叶刀和位于构件的边缘处的第二不同位置处的血液收集部。 所述装置被构造成：当所述构件处于第一旋转位置时，所述刺血针被所述壳体屏蔽，当所述构件处于第二旋转位置时，所述刺血针可操作地刺穿接收在所述孔处的使用者的一部分，以及 当构件处于第三旋转位置时，呈现血液收集部分，以便从在孔处接收的用户的一部分接收血液。

    Allowing Measurements to be Made of a Blood Sample
    9.
    发明申请
    Allowing Measurements to be Made of a Blood Sample 有权
    允许测量血样

    公开(公告)号：US20130281881A1

    公开(公告)日：2013-10-24

    申请号：US13809029

    申请日：2011-07-07

    申请人： Frank Richter ,  Ross MacArthur

    发明人： Frank Richter ,  Ross MacArthur

    IPC分类号： A61B5/15

    CPC分类号： A61B5/150007 ,  A61B5/1486 ,  A61B5/150022 ,  A61B5/150068 ,  A61B5/150412 ,  A61B5/150419 ,  A61B5/150526 ,  A61B5/15113 ,  A61B5/15115 ,  A61B5/15132 ,  A61B5/15153 ,  A61B5/15155 ,  A61B5/15174 ,  A61B5/157

    摘要： Apparatus for allowing measurements to be made of a blood sample comprises a shaft and at least first and second blood collection members. The blood collection members are independently rotatable about the shaft. Each blood collection member includes: a blood analysis part for receiving a blood sample, plural conductive contacts, and plural conductors extending between the blood analysis part and respective ones of the conductive contacts. The apparatus also includes plural terminals configured to provide an electrical connection with the plural conductive contacts on a first member when the apparatus is in a first configuration and to provide an electrical connection with the plural conductive contacts on a second member when the apparatus is in a second configuration, thereby allowing successive measurements of at least one parameter of blood samples provided on the blood analysis parts of the first and second members.

    摘要翻译： 用于允许对血液样本进行测量的装置包括轴和至少第一和第二采血构件。 血液收集构件可以围绕轴独立地旋转。 每个采集部件包括：用于接收血液样本的血液分析部件，多个导电触点，以及在血液分析部件和各个导电触点之间延伸的多个导体。 该装置还包括多个端子，其被配置为当装置处于第一构造时在第一构件上提供与多个导电触点的电连接，并且当装置处于第一构件时，与第二构件上的多个导电触点提供电连接 从而允许连续测量提供在第一和第二成员的血液分析部件上的血液样本的至少一个参数。