发明授权
- 专利标题: Plasmonic in-cell polarizer
- 专利标题(中): 等离子体在室内偏光镜
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申请号: US13558396申请日: 2012-07-26
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公开(公告)号: US08767282B2公开(公告)日: 2014-07-01
- 发明人: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- 申请人: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02B5/30 ; G02F1/1335
摘要:
A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.
公开/授权文献
- US20120287362A1 Plasmonic In-Cell Polarizer 公开/授权日:2012-11-15
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