发明授权
- 专利标题: Temperature measuring apparatus and temperature measuring method
- 专利标题(中): 温度测量仪和温度测量方法
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申请号: US13231027申请日: 2011-09-13
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公开(公告)号: US08777483B2公开(公告)日: 2014-07-15
- 发明人: Jun Yamawaku , Chishio Koshimizu , Tatsuo Matsudo , Kenji Nagai
- 申请人: Jun Yamawaku , Chishio Koshimizu , Tatsuo Matsudo , Kenji Nagai
- 申请人地址: JP
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP
- 代理机构: Cantor Colburn LLP
- 优先权: JP2010-205401 20100914
- 主分类号: G01K1/00
- IPC分类号: G01K1/00 ; G01J5/00
摘要:
The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.
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