发明授权
- 专利标题: Epitaxial lift off in inverted metamorphic multijunction solar cells
- 专利标题(中): 倒置变质多结太阳能电池外延提升
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申请号: US13465477申请日: 2012-05-07
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公开(公告)号: US08778199B2公开(公告)日: 2014-07-15
- 发明人: Arthur Cornfeld , Daniel McGlynn , Tansen Varghese
- 申请人: Arthur Cornfeld , Daniel McGlynn , Tansen Varghese
- 申请人地址: US NM Albuquerque
- 专利权人: Emoore Solar Power, Inc.
- 当前专利权人: Emoore Solar Power, Inc.
- 当前专利权人地址: US NM Albuquerque
- 主分类号: B29D11/00
- IPC分类号: B29D11/00 ; H01L31/0735 ; H01L31/0725 ; H01L31/18 ; H01L31/0687
摘要:
The present disclosure provides a process for manufacturing a solar cell by selectively freeing an epitaxial layer from a single crystal substrate upon which it was grown. In some embodiments the process includes, among other things, providing a first substrate; depositing a separation layer on said first substrate; depositing on said separation layer a sequence of layers of semiconductor material forming a solar cell; mounting and bonding a flexible support on top of the sequence of layers; etching said separation layer while applying an agitating action to the etchant solution so as to remove said flexible support with said epitaxial layer from said first substrate.
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